JPWO2021215337A1 - - Google Patents

Info

Publication number
JPWO2021215337A1
JPWO2021215337A1 JP2022517004A JP2022517004A JPWO2021215337A1 JP WO2021215337 A1 JPWO2021215337 A1 JP WO2021215337A1 JP 2022517004 A JP2022517004 A JP 2022517004A JP 2022517004 A JP2022517004 A JP 2022517004A JP WO2021215337 A1 JPWO2021215337 A1 JP WO2021215337A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022517004A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021215337A1 publication Critical patent/JPWO2021215337A1/ja
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/807Pixel isolation structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/191Photoconductor image sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/20Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182Colour image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/184Infrared image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8067Reflectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/811Interconnections
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/199Back-illuminated image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8053Colour filters
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8057Optical shielding

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP2022517004A 2020-04-20 2021-04-14 Pending JPWO2021215337A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020074995 2020-04-20
PCT/JP2021/015499 WO2021215337A1 (ja) 2020-04-20 2021-04-14 固体撮像素子および電子機器

Publications (1)

Publication Number Publication Date
JPWO2021215337A1 true JPWO2021215337A1 (https=) 2021-10-28

Family

ID=78269297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022517004A Pending JPWO2021215337A1 (https=) 2020-04-20 2021-04-14

Country Status (7)

Country Link
US (1) US20230230986A1 (https=)
EP (1) EP4141938A4 (https=)
JP (1) JPWO2021215337A1 (https=)
KR (1) KR20230007316A (https=)
CN (1) CN115210874A (https=)
TW (1) TW202145549A (https=)
WO (1) WO2021215337A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230068895A (ko) * 2021-11-11 2023-05-18 삼성전자주식회사 이미지 센서
TWI799057B (zh) * 2022-01-04 2023-04-11 力晶積成電子製造股份有限公司 影像感測器積體晶片及其形成方法
JP2024021322A (ja) * 2022-08-03 2024-02-16 ソニーセミコンダクタソリューションズ株式会社 光検出装置及び電子機器
WO2024135127A1 (ja) * 2022-12-23 2024-06-27 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置
CN116435383A (zh) * 2023-04-28 2023-07-14 深圳市汇顶科技股份有限公司 光学传感装置、制备方法和电子设备

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006054262A (ja) * 2004-08-10 2006-02-23 Sony Corp 固体撮像装置
JP2006261372A (ja) * 2005-03-17 2006-09-28 Sony Corp 固体撮像素子および固体撮像素子の製造方法および画像撮影装置
JP2007013147A (ja) * 2005-06-30 2007-01-18 Taiwan Semiconductor Manufacturing Co Ltd 背面照射型半導体デバイス
JP2008147333A (ja) * 2006-12-08 2008-06-26 Sony Corp 固体撮像装置、その製造方法および撮像装置
JP2010056167A (ja) * 2008-08-26 2010-03-11 Sony Corp 固体撮像素子及びその製造方法
JP2010062567A (ja) * 2008-09-05 2010-03-18 Commissariat A L'energie Atomique 光反射cmosイメージセンサ
JP2010118412A (ja) * 2008-11-11 2010-05-27 Panasonic Corp 固体撮像装置及びその製造方法
JP2010147474A (ja) * 2008-12-17 2010-07-01 Samsung Electronics Co Ltd イメージセンサ素子
JP2010166094A (ja) * 2010-04-16 2010-07-29 Sony Corp 固体撮像装置、その製造方法および撮像装置
JP2011054963A (ja) * 2009-08-31 2011-03-17 Internatl Business Mach Corp <Ibm> イメージ・センサ及びその製造方法
JP2012064709A (ja) * 2010-09-15 2012-03-29 Sony Corp 固体撮像装置及び電子機器
WO2013172232A1 (ja) * 2012-05-16 2013-11-21 ソニー株式会社 固体撮像装置、及び、電子機器
JP2014086551A (ja) * 2012-10-23 2014-05-12 Canon Inc 撮像装置及びカメラ
US20150228689A1 (en) * 2014-02-11 2015-08-13 Semiconductor Components Industries, Llc Imaging systems with infrared pixels having increased quantum efficiency
JP2016082133A (ja) * 2014-10-20 2016-05-16 ソニー株式会社 固体撮像素子及び電子機器
WO2018043654A1 (ja) * 2016-09-02 2018-03-08 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置およびその製造方法、並びに電子機器
WO2018079296A1 (ja) * 2016-10-27 2018-05-03 ソニーセミコンダクタソリューションズ株式会社 撮像素子及び電子機器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5521312B2 (ja) * 2008-10-31 2014-06-11 ソニー株式会社 固体撮像装置及びその製造方法、並びに電子機器
JP5131309B2 (ja) * 2010-04-16 2013-01-30 ソニー株式会社 固体撮像装置、その製造方法および撮像装置
JP2012084815A (ja) * 2010-10-14 2012-04-26 Sharp Corp 固体撮像装置および電子情報機器
US8767108B2 (en) * 2011-03-14 2014-07-01 Sony Corporation Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus
JP2016219566A (ja) * 2015-05-19 2016-12-22 株式会社東芝 固体撮像素子およびその製造方法
JP2017139286A (ja) 2016-02-02 2017-08-10 ソニー株式会社 撮像素子、及び、カメラシステム
CN107833900A (zh) * 2017-11-07 2018-03-23 德淮半导体有限公司 背照式互补金属氧化物半导体图像传感器及其制造方法

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006054262A (ja) * 2004-08-10 2006-02-23 Sony Corp 固体撮像装置
JP2006261372A (ja) * 2005-03-17 2006-09-28 Sony Corp 固体撮像素子および固体撮像素子の製造方法および画像撮影装置
JP2007013147A (ja) * 2005-06-30 2007-01-18 Taiwan Semiconductor Manufacturing Co Ltd 背面照射型半導体デバイス
JP2008147333A (ja) * 2006-12-08 2008-06-26 Sony Corp 固体撮像装置、その製造方法および撮像装置
JP2010056167A (ja) * 2008-08-26 2010-03-11 Sony Corp 固体撮像素子及びその製造方法
JP2010062567A (ja) * 2008-09-05 2010-03-18 Commissariat A L'energie Atomique 光反射cmosイメージセンサ
JP2010118412A (ja) * 2008-11-11 2010-05-27 Panasonic Corp 固体撮像装置及びその製造方法
JP2010147474A (ja) * 2008-12-17 2010-07-01 Samsung Electronics Co Ltd イメージセンサ素子
JP2011054963A (ja) * 2009-08-31 2011-03-17 Internatl Business Mach Corp <Ibm> イメージ・センサ及びその製造方法
JP2010166094A (ja) * 2010-04-16 2010-07-29 Sony Corp 固体撮像装置、その製造方法および撮像装置
JP2012064709A (ja) * 2010-09-15 2012-03-29 Sony Corp 固体撮像装置及び電子機器
WO2013172232A1 (ja) * 2012-05-16 2013-11-21 ソニー株式会社 固体撮像装置、及び、電子機器
JP2014086551A (ja) * 2012-10-23 2014-05-12 Canon Inc 撮像装置及びカメラ
US20150228689A1 (en) * 2014-02-11 2015-08-13 Semiconductor Components Industries, Llc Imaging systems with infrared pixels having increased quantum efficiency
JP2016082133A (ja) * 2014-10-20 2016-05-16 ソニー株式会社 固体撮像素子及び電子機器
WO2018043654A1 (ja) * 2016-09-02 2018-03-08 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置およびその製造方法、並びに電子機器
WO2018079296A1 (ja) * 2016-10-27 2018-05-03 ソニーセミコンダクタソリューションズ株式会社 撮像素子及び電子機器

Also Published As

Publication number Publication date
EP4141938A1 (en) 2023-03-01
CN115210874A (zh) 2022-10-18
KR20230007316A (ko) 2023-01-12
WO2021215337A1 (ja) 2021-10-28
US20230230986A1 (en) 2023-07-20
EP4141938A4 (en) 2023-08-23
TW202145549A (zh) 2021-12-01

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