JPWO2021181827A1 - - Google Patents

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Publication number
JPWO2021181827A1
JPWO2021181827A1 JP2022505781A JP2022505781A JPWO2021181827A1 JP WO2021181827 A1 JPWO2021181827 A1 JP WO2021181827A1 JP 2022505781 A JP2022505781 A JP 2022505781A JP 2022505781 A JP2022505781 A JP 2022505781A JP WO2021181827 A1 JPWO2021181827 A1 JP WO2021181827A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022505781A
Other languages
Japanese (ja)
Other versions
JP7164282B2 (ja
JPWO2021181827A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021181827A1 publication Critical patent/JPWO2021181827A1/ja
Publication of JPWO2021181827A5 publication Critical patent/JPWO2021181827A5/ja
Application granted granted Critical
Publication of JP7164282B2 publication Critical patent/JP7164282B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP2022505781A 2020-03-10 2020-12-25 空気流量測定装置 Active JP7164282B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020040656 2020-03-10
JP2020040656 2020-03-10
PCT/JP2020/048699 WO2021181827A1 (ja) 2020-03-10 2020-12-25 空気流量測定装置

Publications (3)

Publication Number Publication Date
JPWO2021181827A1 true JPWO2021181827A1 (https=) 2021-09-16
JPWO2021181827A5 JPWO2021181827A5 (https=) 2022-09-26
JP7164282B2 JP7164282B2 (ja) 2022-11-01

Family

ID=77671564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022505781A Active JP7164282B2 (ja) 2020-03-10 2020-12-25 空気流量測定装置

Country Status (5)

Country Link
US (1) US12169137B2 (https=)
JP (1) JP7164282B2 (https=)
CN (1) CN115176130A (https=)
DE (1) DE112020006397T5 (https=)
WO (1) WO2021181827A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0158104B2 (https=) * 1982-07-07 1989-12-08 Kaiyosha Kk
JP5743871B2 (ja) * 2011-12-07 2015-07-01 日立オートモティブシステムズ株式会社 熱式流量計
JP6043833B2 (ja) * 2015-04-27 2016-12-14 日立オートモティブシステムズ株式会社 熱式流量計
JP6134840B2 (ja) * 2016-05-16 2017-05-24 日立オートモティブシステムズ株式会社 熱式流量計
JP6215502B2 (ja) * 2017-04-17 2017-10-18 日立オートモティブシステムズ株式会社 熱式流量計
JP2020003440A (ja) * 2018-07-02 2020-01-09 日立オートモティブシステムズ株式会社 熱式流量測定装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8057882B2 (en) * 2006-03-28 2011-11-15 Kobe Steel, Ltd. Membrane structure element and method for manufacturing same
JP5456815B2 (ja) * 2010-10-13 2014-04-02 日立オートモティブシステムズ株式会社 流量センサおよびその製造方法
JP5676527B2 (ja) * 2012-06-15 2015-02-25 日立オートモティブシステムズ株式会社 熱式流量計
JP5755185B2 (ja) * 2012-06-15 2015-07-29 日立オートモティブシステムズ株式会社 熱式流量計
JP6096070B2 (ja) * 2013-06-20 2017-03-15 日立オートモティブシステムズ株式会社 熱式流量計の製造方法
JP6198697B2 (ja) * 2014-08-14 2017-09-20 日立オートモティブシステムズ株式会社 熱式流量計
JP5841211B2 (ja) * 2014-09-01 2016-01-13 日立オートモティブシステムズ株式会社 物理量計測装置及びその製造方法
JP2017020982A (ja) * 2015-07-15 2017-01-26 日立オートモティブシステムズ株式会社 熱式空気流量計
JP6458104B2 (ja) 2017-09-11 2019-01-23 日立オートモティブシステムズ株式会社 熱式流量計
JP2020034508A (ja) * 2018-08-31 2020-03-05 日立オートモティブシステムズ株式会社 物理量検出装置
JP2021131323A (ja) * 2020-02-20 2021-09-09 サーパス工業株式会社 流量計および流量計の製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0158104B2 (https=) * 1982-07-07 1989-12-08 Kaiyosha Kk
JP5743871B2 (ja) * 2011-12-07 2015-07-01 日立オートモティブシステムズ株式会社 熱式流量計
JP6043833B2 (ja) * 2015-04-27 2016-12-14 日立オートモティブシステムズ株式会社 熱式流量計
JP6134840B2 (ja) * 2016-05-16 2017-05-24 日立オートモティブシステムズ株式会社 熱式流量計
JP6215502B2 (ja) * 2017-04-17 2017-10-18 日立オートモティブシステムズ株式会社 熱式流量計
JP2020003440A (ja) * 2018-07-02 2020-01-09 日立オートモティブシステムズ株式会社 熱式流量測定装置

Also Published As

Publication number Publication date
WO2021181827A1 (ja) 2021-09-16
US12169137B2 (en) 2024-12-17
JP7164282B2 (ja) 2022-11-01
US20230079532A1 (en) 2023-03-16
DE112020006397T5 (de) 2022-10-20
CN115176130A (zh) 2022-10-11

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