JPWO2021153678A1 - - Google Patents
Info
- Publication number
- JPWO2021153678A1 JPWO2021153678A1 JP2021574111A JP2021574111A JPWO2021153678A1 JP WO2021153678 A1 JPWO2021153678 A1 JP WO2021153678A1 JP 2021574111 A JP2021574111 A JP 2021574111A JP 2021574111 A JP2021574111 A JP 2021574111A JP WO2021153678 A1 JPWO2021153678 A1 JP WO2021153678A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/12—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
- H01B1/124—Intrinsically conductive polymers
- H01B1/127—Intrinsically conductive polymers comprising five-membered aromatic rings in the main chain, e.g. polypyrroles, polythiophenes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/02—Polyamines
- C08G73/026—Wholly aromatic polyamines
- C08G73/0266—Polyanilines or derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
- C08L101/12—Compositions of unspecified macromolecular compounds characterised by physical features, e.g. anisotropy, viscosity or electrical conductivity
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L65/00—Compositions of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D165/00—Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Coating compositions based on derivatives of such polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/12—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
- H01B1/124—Intrinsically conductive polymers
- H01B1/128—Intrinsically conductive polymers comprising six-membered aromatic rings in the main chain, e.g. polyanilines, polyphenylenes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G2261/10—Definition of the polymer structure
- C08G2261/14—Side-groups
- C08G2261/142—Side-chains containing oxygen
- C08G2261/1424—Side-chains containing oxygen containing ether groups, including alkoxy
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G2261/30—Monomer units or repeat units incorporating structural elements in the main chain
- C08G2261/32—Monomer units or repeat units incorporating structural elements in the main chain incorporating heteroaromatic structural elements in the main chain
- C08G2261/322—Monomer units or repeat units incorporating structural elements in the main chain incorporating heteroaromatic structural elements in the main chain non-condensed
- C08G2261/3223—Monomer units or repeat units incorporating structural elements in the main chain incorporating heteroaromatic structural elements in the main chain non-condensed containing one or more sulfur atoms as the only heteroatom, e.g. thiophene
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G2261/40—Polymerisation processes
- C08G2261/43—Chemical oxidative coupling reactions, e.g. with FeCl3
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G2261/50—Physical properties
- C08G2261/65—Electrical insulator
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G2261/70—Post-treatment
- C08G2261/79—Post-treatment doping
- C08G2261/794—Post-treatment doping with polymeric dopants
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Environmental & Geological Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Dispersion Chemistry (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Materials For Photolithography (AREA)
- Conductive Materials (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020012623 | 2020-01-29 | ||
JP2020012623 | 2020-01-29 | ||
PCT/JP2021/003062 WO2021153678A1 (ja) | 2020-01-29 | 2021-01-28 | 導電性組成物、レジスト被覆材料、レジスト、及びレジストパターンの形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021153678A1 true JPWO2021153678A1 (ja) | 2021-08-05 |
JP7517352B2 JP7517352B2 (ja) | 2024-07-17 |
Family
ID=77079166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021574111A Active JP7517352B2 (ja) | 2020-01-29 | 2021-01-28 | 導電性組成物、レジスト被覆材料、レジスト、及びレジストパターンの形成方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20220382155A1 (ja) |
EP (1) | EP4098702A4 (ja) |
JP (1) | JP7517352B2 (ja) |
KR (1) | KR20220114591A (ja) |
CN (1) | CN114945635B (ja) |
TW (1) | TW202130671A (ja) |
WO (1) | WO2021153678A1 (ja) |
Citations (5)
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---|---|---|---|---|
CN102993413A (zh) * | 2012-11-23 | 2013-03-27 | 东华大学 | 双子表面活性剂掺杂pedot导电纳米粒子的制备方法 |
WO2014006821A1 (ja) * | 2012-07-02 | 2014-01-09 | 信越ポリマー株式会社 | 導電性高分子組成物、該組成物より得られる帯電防止膜が設けられた被覆品、及び前記組成物を用いたパターン形成方法 |
WO2014017540A1 (ja) * | 2012-07-24 | 2014-01-30 | 三菱レイヨン株式会社 | 導電体、導電性組成物、及び積層体 |
CN106953066A (zh) * | 2017-03-31 | 2017-07-14 | 东莞市永邦新能源科技有限公司 | 一种正极浆料的涂布工艺 |
WO2019146715A1 (ja) * | 2018-01-26 | 2019-08-01 | 三菱ケミカル株式会社 | 導電性組成物とその製造方法及び水溶性ポリマーとその製造方法 |
Family Cites Families (26)
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JPH089662B2 (ja) | 1985-02-26 | 1996-01-31 | 日東電工株式会社 | 導電性材料 |
KR960009685B1 (ko) | 1986-03-24 | 1996-07-23 | 유니버시티 오브 캘리포니아 평의원 | 자기 도우프된 중합체의 제조방법 |
GB8717458D0 (en) | 1987-07-23 | 1987-08-26 | Cookson Group Plc | Electroconductive polymers |
US5137991A (en) | 1988-05-13 | 1992-08-11 | The Ohio State University Research Foundation | Polyaniline compositions, processes for their preparation and uses thereof |
US5164465A (en) | 1988-05-13 | 1992-11-17 | Ohio State University Research Foundation | Sulfonated polyaniline salt compositions, processes for their preparation and uses thereof |
JP2902727B2 (ja) | 1990-05-30 | 1999-06-07 | 株式会社日立製作所 | 荷電粒子線照射方法及び観察方法 |
JPH04268331A (ja) | 1991-02-25 | 1992-09-24 | Fuji Xerox Co Ltd | 自己ドーピング機能を有する導電性重合体の製造方法 |
JP3147407B2 (ja) | 1991-04-26 | 2001-03-19 | 昭和電工株式会社 | 導電性高分子複合材料およびその製造方法 |
JPH05226238A (ja) | 1991-10-31 | 1993-09-03 | Internatl Business Mach Corp <Ibm> | E−ビームレジスト用の塩基現像可能な放電トップ層 |
JP3051244B2 (ja) | 1991-12-27 | 2000-06-12 | 三菱レイヨン株式会社 | アニリン系共重合体スルホン化物とその製法 |
JP3066431B2 (ja) | 1992-07-20 | 2000-07-17 | 昭和電工株式会社 | 導電性高分子複合物の製造方法 |
JP3186328B2 (ja) | 1992-07-20 | 2001-07-11 | 昭和電工株式会社 | 導電性複合物及びその製造法 |
JPH0656987A (ja) | 1992-08-11 | 1994-03-01 | Bridgestone Corp | 導電性高分子の製造方法 |
JP3184642B2 (ja) | 1992-11-09 | 2001-07-09 | 昭和電工株式会社 | 導電性複合材料およびその製造方法 |
JP2903038B2 (ja) | 1993-02-15 | 1999-06-07 | 三菱レイヨン株式会社 | アニリン系導電性ポリマーとその製造方法 |
JP3149290B2 (ja) | 1993-03-08 | 2001-03-26 | 昭和電工株式会社 | 導電性重合体の製造方法 |
JP3814830B2 (ja) | 1993-05-28 | 2006-08-30 | 昭和電工株式会社 | 帯電防止材料、それを用いる帯電防止方法及び観察または検査方法、及び帯電が防止された物品 |
JP3413956B2 (ja) | 1993-05-31 | 2003-06-09 | 昭和電工株式会社 | 導電性重合体の製造方法 |
JP3037547B2 (ja) | 1993-09-03 | 2000-04-24 | 三菱レイヨン株式会社 | 導電性組成物、導電体及びその形成方法 |
JP2959968B2 (ja) | 1994-04-04 | 1999-10-06 | 三菱レイヨン株式会社 | 可溶性アニリン系導電性ポリマーの製造方法 |
JP4964608B2 (ja) * | 2006-02-08 | 2012-07-04 | 昭和電工株式会社 | 帯電防止剤、帯電防止膜及び帯電防止膜被覆物品 |
JP5394016B2 (ja) * | 2008-07-03 | 2014-01-22 | 三菱レイヨン株式会社 | レジストパターン形成方法 |
JP5533172B2 (ja) | 2010-04-13 | 2014-06-25 | 三菱レイヨン株式会社 | 導電性樹脂組成物の製造方法 |
JP6131780B2 (ja) | 2012-09-06 | 2017-05-24 | 東ソー株式会社 | ポリチオフェン及びその水溶液、並びにそのチオフェンモノマー |
JP7087265B2 (ja) * | 2015-08-20 | 2022-06-21 | 三菱ケミカル株式会社 | 導電性組成物、導電体及びレジストパターンの形成方法 |
JP7137192B2 (ja) | 2018-07-20 | 2022-09-14 | 春日電機株式会社 | 除水または除塵装置 |
-
2021
- 2021-01-28 EP EP21747640.7A patent/EP4098702A4/en active Pending
- 2021-01-28 CN CN202180009244.4A patent/CN114945635B/zh active Active
- 2021-01-28 TW TW110103250A patent/TW202130671A/zh unknown
- 2021-01-28 JP JP2021574111A patent/JP7517352B2/ja active Active
- 2021-01-28 KR KR1020227023615A patent/KR20220114591A/ko not_active Application Discontinuation
- 2021-01-28 WO PCT/JP2021/003062 patent/WO2021153678A1/ja unknown
-
2022
- 2022-07-25 US US17/814,718 patent/US20220382155A1/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014006821A1 (ja) * | 2012-07-02 | 2014-01-09 | 信越ポリマー株式会社 | 導電性高分子組成物、該組成物より得られる帯電防止膜が設けられた被覆品、及び前記組成物を用いたパターン形成方法 |
WO2014017540A1 (ja) * | 2012-07-24 | 2014-01-30 | 三菱レイヨン株式会社 | 導電体、導電性組成物、及び積層体 |
CN102993413A (zh) * | 2012-11-23 | 2013-03-27 | 东华大学 | 双子表面活性剂掺杂pedot导电纳米粒子的制备方法 |
CN106953066A (zh) * | 2017-03-31 | 2017-07-14 | 东莞市永邦新能源科技有限公司 | 一种正极浆料的涂布工艺 |
WO2019146715A1 (ja) * | 2018-01-26 | 2019-08-01 | 三菱ケミカル株式会社 | 導電性組成物とその製造方法及び水溶性ポリマーとその製造方法 |
Non-Patent Citations (1)
Title |
---|
"ジェミニ型界面活性剤を用いた使用感に優れた耐水性O/Wエマルジョンの調製", J.SOC.COSMET.CHEM.JPN VOL.51 NO.1 2017, JPN6021010805, JP, pages 9頁アブストラクト, ISSN: 0005087481 * |
Also Published As
Publication number | Publication date |
---|---|
EP4098702A4 (en) | 2023-07-26 |
CN114945635A (zh) | 2022-08-26 |
JP7517352B2 (ja) | 2024-07-17 |
CN114945635B (zh) | 2024-06-18 |
WO2021153678A1 (ja) | 2021-08-05 |
KR20220114591A (ko) | 2022-08-17 |
US20220382155A1 (en) | 2022-12-01 |
EP4098702A1 (en) | 2022-12-07 |
TW202130671A (zh) | 2021-08-16 |
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