JPWO2021113131A5 - - Google Patents

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Publication number
JPWO2021113131A5
JPWO2021113131A5 JP2022532572A JP2022532572A JPWO2021113131A5 JP WO2021113131 A5 JPWO2021113131 A5 JP WO2021113131A5 JP 2022532572 A JP2022532572 A JP 2022532572A JP 2022532572 A JP2022532572 A JP 2022532572A JP WO2021113131 A5 JPWO2021113131 A5 JP WO2021113131A5
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JP
Japan
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rfpm
view
arrangement
region
angle
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JP2022532572A
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English (en)
Japanese (ja)
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JP7678810B2 (ja
JP2023504151A (ja
JP2023504151A5 (https=
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Priority claimed from PCT/US2020/062108 external-priority patent/WO2021113131A1/en
Publication of JP2023504151A publication Critical patent/JP2023504151A/ja
Publication of JPWO2021113131A5 publication Critical patent/JPWO2021113131A5/ja
Publication of JP2023504151A5 publication Critical patent/JP2023504151A5/ja
Priority to JP2025076559A priority Critical patent/JP2025111782A/ja
Application granted granted Critical
Publication of JP7678810B2 publication Critical patent/JP7678810B2/ja
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JP2022532572A 2019-12-02 2020-11-24 反射フーリエプティコグラフィによる大型表面の撮像 Active JP7678810B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025076559A JP2025111782A (ja) 2019-12-02 2025-05-02 反射フーリエプティコグラフィによる大型表面の撮像

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962942636P 2019-12-02 2019-12-02
US62/942,636 2019-12-02
PCT/US2020/062108 WO2021113131A1 (en) 2019-12-02 2020-11-24 Reflective fourier ptychography imaging of large surfaces

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025076559A Division JP2025111782A (ja) 2019-12-02 2025-05-02 反射フーリエプティコグラフィによる大型表面の撮像

Publications (4)

Publication Number Publication Date
JP2023504151A JP2023504151A (ja) 2023-02-01
JPWO2021113131A5 true JPWO2021113131A5 (https=) 2023-11-27
JP2023504151A5 JP2023504151A5 (https=) 2023-11-27
JP7678810B2 JP7678810B2 (ja) 2025-05-16

Family

ID=76222154

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022532572A Active JP7678810B2 (ja) 2019-12-02 2020-11-24 反射フーリエプティコグラフィによる大型表面の撮像
JP2025076559A Pending JP2025111782A (ja) 2019-12-02 2025-05-02 反射フーリエプティコグラフィによる大型表面の撮像

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025076559A Pending JP2025111782A (ja) 2019-12-02 2025-05-02 反射フーリエプティコグラフィによる大型表面の撮像

Country Status (6)

Country Link
US (1) US20220413276A1 (https=)
JP (2) JP7678810B2 (https=)
KR (1) KR20220104821A (https=)
CN (1) CN115053122A (https=)
TW (1) TW202136753A (https=)
WO (1) WO2021113131A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11689821B2 (en) * 2020-08-07 2023-06-27 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Incoherent Fourier ptychographic super-resolution imaging system with priors
FR3125893A1 (fr) * 2021-07-29 2023-02-03 Institut Mines Telecom Système d’éclairage, notamment à usage de microscopie
KR20240108945A (ko) 2023-01-03 2024-07-10 삼성전자주식회사 기판 검사 장치 및 기판 검사 방법
US20240353665A1 (en) * 2023-03-30 2024-10-24 California Institute Of Technology Angular ptychographic imaging with closed-form reconstruction
US12581754B2 (en) * 2023-05-16 2026-03-17 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus to enhance semiconductor device manufacturing
CN120254888B (zh) * 2025-05-30 2025-09-09 长春理工大学 基于偏振关联算法的水下溢油成像探测方法及设备

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9497379B2 (en) 2013-08-22 2016-11-15 California Institute Of Technology Variable-illumination fourier ptychographic imaging devices, systems, and methods
US9892812B2 (en) 2012-10-30 2018-02-13 California Institute Of Technology Fourier ptychographic x-ray imaging systems, devices, and methods
US20160154301A1 (en) * 2013-06-17 2016-06-02 Paul Scherrer Institut Scanning coherent diffractive imaging method and system for actinic mask inspection for euv lithography
DE102014213198B4 (de) * 2014-07-08 2020-08-06 Carl Zeiss Ag Verfahren zur Lokalisierung von Defekten auf Substraten
WO2016090331A1 (en) 2014-12-04 2016-06-09 California Institute Of Technology Multiplexed fourier ptychography imaging systems and methods
WO2016106379A1 (en) 2014-12-22 2016-06-30 California Institute Of Technology Epi-illumination fourier ptychographic imaging for thick samples
AU2014280894A1 (en) * 2014-12-23 2016-07-07 Canon Kabushiki Kaisha Illumination systems and devices for Fourier Ptychographic imaging
WO2016187591A1 (en) * 2015-05-21 2016-11-24 California Institute Of Technology Laser-based fourier ptychographic imaging systems and methods
CN108431692B (zh) * 2015-12-23 2021-06-18 Asml荷兰有限公司 量测方法、量测设备和器件制造方法
US10739275B2 (en) * 2016-09-15 2020-08-11 Kla-Tencor Corporation Simultaneous multi-directional laser wafer inspection
CN106707486B (zh) 2017-01-24 2019-07-26 清华大学 基于fpm的宽视场显微成像方法及系统
KR20190088277A (ko) * 2018-01-18 2019-07-26 서울대학교산학협력단 단일촬영 푸리에 타이코그래피 마이크로스코피 시스템

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