JPWO2020214616A5 - - Google Patents

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JPWO2020214616A5
JPWO2020214616A5 JP2021560971A JP2021560971A JPWO2020214616A5 JP WO2020214616 A5 JPWO2020214616 A5 JP WO2020214616A5 JP 2021560971 A JP2021560971 A JP 2021560971A JP 2021560971 A JP2021560971 A JP 2021560971A JP WO2020214616 A5 JPWO2020214616 A5 JP WO2020214616A5
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gas
primitive
port
substrate
primitive substrate
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JP2021560971A
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JP7553468B2 (ja
JP2022529263A5 (https=
JP2022529263A (ja
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Priority claimed from PCT/US2020/028158 external-priority patent/WO2020214616A1/en
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JP2021560971A 2019-04-15 2020-04-14 ガス送給用のモジュール式構成要素システム Active JP7553468B2 (ja)

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JP2024152794A JP2024174940A (ja) 2019-04-15 2024-09-05 ガス送給用のモジュール式構成要素システム

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US201962834241P 2019-04-15 2019-04-15
US62/834,241 2019-04-15
PCT/US2020/028158 WO2020214616A1 (en) 2019-04-15 2020-04-14 Modular-component system for gas delivery

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JP2024152794A Division JP2024174940A (ja) 2019-04-15 2024-09-05 ガス送給用のモジュール式構成要素システム

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JP2022529263A JP2022529263A (ja) 2022-06-20
JP2022529263A5 JP2022529263A5 (https=) 2023-04-12
JPWO2020214616A5 true JPWO2020214616A5 (https=) 2023-04-12
JP7553468B2 JP7553468B2 (ja) 2024-09-18

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JP2021560971A Active JP7553468B2 (ja) 2019-04-15 2020-04-14 ガス送給用のモジュール式構成要素システム
JP2024152794A Pending JP2024174940A (ja) 2019-04-15 2024-09-05 ガス送給用のモジュール式構成要素システム

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US (2) US11996301B2 (https=)
JP (2) JP7553468B2 (https=)
KR (2) KR20250057125A (https=)
CN (2) CN113994460B (https=)
TW (1) TWI860346B (https=)
WO (1) WO2020214616A1 (https=)

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