JPWO2020086710A5 - - Google Patents

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Publication number
JPWO2020086710A5
JPWO2020086710A5 JP2021521401A JP2021521401A JPWO2020086710A5 JP WO2020086710 A5 JPWO2020086710 A5 JP WO2020086710A5 JP 2021521401 A JP2021521401 A JP 2021521401A JP 2021521401 A JP2021521401 A JP 2021521401A JP WO2020086710 A5 JPWO2020086710 A5 JP WO2020086710A5
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Japan
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chamber
opening
exhaust
substrate holder
container
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JP2021521401A
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Japanese (ja)
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JP2022505397A5 (https=
JP2022505397A (ja
JP7279158B2 (ja
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Priority claimed from US16/657,787 external-priority patent/US11508593B2/en
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Publication of JPWO2020086710A5 publication Critical patent/JPWO2020086710A5/ja
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JP2021521401A 2018-10-26 2019-10-23 側部収納ポッド、電子デバイス処理システムおよびその操作方法 Active JP7279158B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862751526P 2018-10-26 2018-10-26
US62/751,526 2018-10-26
US16/657,787 2019-10-18
US16/657,787 US11508593B2 (en) 2018-10-26 2019-10-18 Side storage pods, electronic device processing systems, and methods for operating the same
PCT/US2019/057651 WO2020086710A1 (en) 2018-10-26 2019-10-23 Side storage pods, electronic device processing systems, and methods for operating the same

Publications (4)

Publication Number Publication Date
JP2022505397A JP2022505397A (ja) 2022-01-14
JP2022505397A5 JP2022505397A5 (https=) 2023-02-02
JPWO2020086710A5 true JPWO2020086710A5 (https=) 2023-02-02
JP7279158B2 JP7279158B2 (ja) 2023-05-22

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ID=70327366

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JP2021521401A Active JP7279158B2 (ja) 2018-10-26 2019-10-23 側部収納ポッド、電子デバイス処理システムおよびその操作方法

Country Status (6)

Country Link
US (2) US11508593B2 (https=)
JP (1) JP7279158B2 (https=)
KR (1) KR102531097B1 (https=)
CN (1) CN112970098B (https=)
TW (1) TWI799658B (https=)
WO (1) WO2020086710A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
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US11508593B2 (en) * 2018-10-26 2022-11-22 Applied Materials, Inc. Side storage pods, electronic device processing systems, and methods for operating the same
US11244844B2 (en) 2018-10-26 2022-02-08 Applied Materials, Inc. High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
US11373891B2 (en) * 2018-10-26 2022-06-28 Applied Materials, Inc. Front-ducted equipment front end modules, side storage pods, and methods of operating the same
KR102202463B1 (ko) * 2019-03-13 2021-01-14 세메스 주식회사 기판 처리 장치 및 방법
US20220310412A1 (en) * 2021-03-23 2022-09-29 Rorze Technology Incorporated Gas circulation structure of equipment front end module (efem)
US20230062038A1 (en) * 2021-08-30 2023-03-02 Taiwan Semiconductor Manufacturing Company Limited Vent port diffuser
TWI823271B (zh) * 2022-02-24 2023-11-21 天虹科技股份有限公司 基板傳送方法
KR102729958B1 (ko) * 2022-06-15 2024-11-13 세메스 주식회사 장비 전단부 모듈 및 이의 동작 방법, 이를 포함하는 기판 처리 장치

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KR20180045316A (ko) * 2016-10-25 2018-05-04 삼성전자주식회사 설비 전방 단부 모듈 및 이를 포함하는 반도체 제조 장치
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