JPWO2020086709A5 - - Google Patents
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- Publication number
- JPWO2020086709A5 JPWO2020086709A5 JP2021521518A JP2021521518A JPWO2020086709A5 JP WO2020086709 A5 JPWO2020086709 A5 JP WO2020086709A5 JP 2021521518 A JP2021521518 A JP 2021521518A JP 2021521518 A JP2021521518 A JP 2021521518A JP WO2020086709 A5 JPWO2020086709 A5 JP WO2020086709A5
- Authority
- JP
- Japan
- Prior art keywords
- end module
- equipment front
- storage pod
- upper plenum
- side storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000969 carrier Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 11
- 238000000034 method Methods 0.000 claims 6
- 230000005465 channeling Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000003134 recirculating effect Effects 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229920002943 EPDM rubber Polymers 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862751514P | 2018-10-26 | 2018-10-26 | |
| US62/751,514 | 2018-10-26 | ||
| US16/660,057 US11373891B2 (en) | 2018-10-26 | 2019-10-22 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
| US16/660,057 | 2019-10-22 | ||
| PCT/US2019/057650 WO2020086709A1 (en) | 2018-10-26 | 2019-10-23 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022505473A JP2022505473A (ja) | 2022-01-14 |
| JP2022505473A5 JP2022505473A5 (https=) | 2022-08-19 |
| JPWO2020086709A5 true JPWO2020086709A5 (https=) | 2022-08-19 |
| JP7365408B2 JP7365408B2 (ja) | 2023-10-19 |
Family
ID=70325553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021521518A Active JP7365408B2 (ja) | 2018-10-26 | 2019-10-23 | 前面ダクト式機器フロントエンドモジュール、側面ストレージポッド、及びそれらの操作方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US11373891B2 (https=) |
| JP (1) | JP7365408B2 (https=) |
| KR (1) | KR102577683B1 (https=) |
| CN (1) | CN112970099A (https=) |
| TW (2) | TW202314930A (https=) |
| WO (1) | WO2020086709A1 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11610794B2 (en) * | 2018-10-26 | 2023-03-21 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating the same |
| US11244844B2 (en) * | 2018-10-26 | 2022-02-08 | Applied Materials, Inc. | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods |
| US11189511B2 (en) * | 2018-10-26 | 2021-11-30 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating EFEMs |
| US11373891B2 (en) | 2018-10-26 | 2022-06-28 | Applied Materials, Inc. | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
| KR102202463B1 (ko) * | 2019-03-13 | 2021-01-14 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
| KR102208017B1 (ko) * | 2019-08-14 | 2021-01-27 | 로체 시스템즈(주) | 기판 반송 장치 |
| US12076854B2 (en) * | 2021-03-18 | 2024-09-03 | Applied Materials, Inc. | Increased number of load ports on factory interface with robot that moves on track |
| US12370573B2 (en) * | 2021-10-06 | 2025-07-29 | Applied Materials, Inc. | Equipment front end modules with induced gas mixing, and methods of use thereof |
| KR102780011B1 (ko) * | 2022-02-09 | 2025-03-12 | 주식회사 저스템 | Efem의 버퍼 챔버 장치 및 이를 구비한 반도체 공정장치 |
| KR102780012B1 (ko) * | 2022-02-09 | 2025-03-12 | 주식회사 저스템 | Efem의 버퍼 챔버 장치 및 이를 구비한 반도체 공정장치 |
| KR102729958B1 (ko) * | 2022-06-15 | 2024-11-13 | 세메스 주식회사 | 장비 전단부 모듈 및 이의 동작 방법, 이를 포함하는 기판 처리 장치 |
| US20260096386A1 (en) * | 2024-09-30 | 2026-04-02 | Applied Materials, Inc. | Load lock chamber improvement |
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| JP2004179519A (ja) | 2002-11-28 | 2004-06-24 | Tokyo Ohka Kogyo Co Ltd | 基板処理装置 |
| JP4816545B2 (ja) | 2007-03-30 | 2011-11-16 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
| US9105673B2 (en) | 2007-05-09 | 2015-08-11 | Brooks Automation, Inc. | Side opening unified pod |
| TW200948688A (en) | 2007-12-18 | 2009-12-01 | Entegris Inc | Methods and apparatuses for controlling contamination of substrates |
| KR101951911B1 (ko) | 2011-06-28 | 2019-02-25 | 다이나믹 마이크로시스템즈 세미컨덕터 이큅먼트 게엠베하 | 반도체 스토커 시스템들 및 방법들 |
| JP5603314B2 (ja) | 2011-12-01 | 2014-10-08 | 東京エレクトロン株式会社 | 搬送装置及び基板処理システム |
| KR101215962B1 (ko) | 2012-07-30 | 2012-12-27 | 이프로링크텍(주) | Ｅｆｅｍ의 버퍼 스토리지 박스 |
| TW201413780A (zh) | 2012-09-24 | 2014-04-01 | 尤金科技有限公司 | 煙氣移除設備及基板處理設備 |
| WO2015023591A1 (en) | 2013-08-12 | 2015-02-19 | Applied Materials, Inc | Substrate processing systems, apparatus, and methods with factory interface environmental controls |
| US9272315B2 (en) | 2013-10-11 | 2016-03-01 | Taiwan Semiconductor Manufacturing Co., Ltd | Mechanisms for controlling gas flow in enclosure |
| KR101682473B1 (ko) | 2013-10-18 | 2016-12-05 | 삼성전자주식회사 | 사이드 스토리지 및 이를 구비하는 반도체 소자 제조 설비 |
| TWI784799B (zh) | 2013-12-13 | 2022-11-21 | 日商昕芙旎雅股份有限公司 | 設備前端模組（ｅｆｅｍ）系統 |
| JP6349750B2 (ja) | 2014-01-31 | 2018-07-04 | シンフォニアテクノロジー株式会社 | Ｅｆｅｍ |
| KR102162366B1 (ko) | 2014-01-21 | 2020-10-06 | 우범제 | 퓸 제거 장치 |
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| KR102418431B1 (ko) * | 2014-10-24 | 2022-07-07 | 어플라이드 머티어리얼스, 인코포레이티드 | 팩토리 인터페이스에서 기판 캐리어를 퍼징하기 위한 시스템들, 장치, 및 방법들 |
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| KR20210080633A (ko) | 2014-11-25 | 2021-06-30 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 캐리어 및 퍼지 챔버 환경 제어들을 이용하는 기판 프로세싱 시스템들, 장치, 및 방법들 |
| KR101637498B1 (ko) | 2015-03-24 | 2016-07-07 | 피코앤테라(주) | 웨이퍼 수납용기 |
| JP6450653B2 (ja) * | 2015-06-24 | 2019-01-09 | 東京エレクトロン株式会社 | 格納ユニット、搬送装置、及び、基板処理システム |
| JP6606551B2 (ja) | 2015-08-04 | 2019-11-13 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置、半導体装置の製造方法および記録媒体 |
| TWI780030B (zh) | 2015-10-05 | 2022-10-11 | 德商布魯克斯Ｃｃｓ有限公司 | 形成用於一半導體基板並具有低溼度值的一乾淨的環境的方法及系統 |
| US10515834B2 (en) * | 2015-10-12 | 2019-12-24 | Lam Research Corporation | Multi-station tool with wafer transfer microclimate systems |
| JP6555091B2 (ja) * | 2015-11-10 | 2019-08-07 | シンフォニアテクノロジー株式会社 | ロボット搬送装置 |
| JP6679906B2 (ja) | 2015-12-11 | 2020-04-15 | Tdk株式会社 | Ｅｆｅｍ |
| JP6613864B2 (ja) * | 2015-12-14 | 2019-12-04 | Ｔｄｋ株式会社 | ミニエンバイロメント装置 |
| JP6851075B2 (ja) * | 2016-09-15 | 2021-03-31 | ユニチカ株式会社 | 成型用メッシュ織物の製造方法 |
| KR20180045316A (ko) | 2016-10-25 | 2018-05-04 | 삼성전자주식회사 | 설비 전방 단부 모듈 및 이를 포함하는 반도체 제조 장치 |
| US10159169B2 (en) | 2016-10-27 | 2018-12-18 | Applied Materials, Inc. | Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods |
| KR102618491B1 (ko) | 2016-10-31 | 2023-12-28 | 삼성전자주식회사 | 기판 이송 장치 |
| US10453727B2 (en) * | 2016-11-10 | 2019-10-22 | Applied Materials, Inc. | Electronic device manufacturing load port apparatus, systems, and methods |
| KR102729711B1 (ko) | 2016-12-23 | 2024-11-13 | 피코앤테라(주) | 이에프이엠 |
| US10446428B2 (en) * | 2017-03-14 | 2019-10-15 | Applied Materials, Inc. | Load port operation in electronic device manufacturing apparatus, systems, and methods |
| JP7001910B2 (ja) | 2017-03-31 | 2022-01-20 | シンフォニアテクノロジー株式会社 | ロボット搬送装置 |
| US10566216B2 (en) | 2017-06-09 | 2020-02-18 | Lam Research Corporation | Equipment front end module gas recirculation |
| US10388547B2 (en) | 2017-06-23 | 2019-08-20 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for processing substrates |
| CN110770890B (zh) | 2017-06-23 | 2023-09-08 | 应用材料公司 | 可索引侧储存仓设备、加热的侧储存仓设备、系统和方法 |
| CN111316417B (zh) | 2017-11-27 | 2023-12-22 | 阿斯莫Ip控股公司 | 与批式炉偕同使用的用于储存晶圆匣的储存装置 |
| US10763134B2 (en) | 2018-02-27 | 2020-09-01 | Applied Materials, Inc. | Substrate processing apparatus and methods with factory interface chamber filter purge |
| KR102100775B1 (ko) * | 2018-03-14 | 2020-04-14 | 우범제 | 이에프이엠 |
| JP7037049B2 (ja) | 2018-03-15 | 2022-03-16 | シンフォニアテクノロジー株式会社 | Ｅｆｅｍ |
| JP7100243B2 (ja) * | 2018-04-19 | 2022-07-13 | シンフォニアテクノロジー株式会社 | 排気ノズルユニット、ロードポート、及びｅｆｅｍ |
| JP6583482B2 (ja) * | 2018-05-24 | 2019-10-02 | シンフォニアテクノロジー株式会社 | Ｅｆｅｍ |
| KR102592920B1 (ko) * | 2018-07-16 | 2023-10-23 | 삼성전자주식회사 | 로드락 모듈 및 이를 포함하는 반도체 제조 장치 |
| US11189511B2 (en) | 2018-10-26 | 2021-11-30 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating EFEMs |
| US11244844B2 (en) | 2018-10-26 | 2022-02-08 | Applied Materials, Inc. | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods |
| US11610794B2 (en) | 2018-10-26 | 2023-03-21 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating the same |
| US11373891B2 (en) | 2018-10-26 | 2022-06-28 | Applied Materials, Inc. | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
| US11749537B2 (en) | 2018-10-26 | 2023-09-05 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating equipment front end modules |
| US11508593B2 (en) * | 2018-10-26 | 2022-11-22 | Applied Materials, Inc. | Side storage pods, electronic device processing systems, and methods for operating the same |
-
2019
- 2019-10-22 US US16/660,057 patent/US11373891B2/en active Active
- 2019-10-23 JP JP2021521518A patent/JP7365408B2/ja active Active
- 2019-10-23 KR KR1020217015630A patent/KR102577683B1/ko active Active
- 2019-10-23 CN CN201980070805.4A patent/CN112970099A/zh active Pending
- 2019-10-23 WO PCT/US2019/057650 patent/WO2020086709A1/en not_active Ceased
- 2019-10-25 TW TW111142503A patent/TW202314930A/zh unknown
- 2019-10-25 TW TW108138612A patent/TWI785279B/zh active
-
2022
- 2022-06-01 US US17/829,607 patent/US20220293444A1/en not_active Abandoned
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