JPWO2020018850A5 - - Google Patents
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- Publication number
- JPWO2020018850A5 JPWO2020018850A5 JP2021502883A JP2021502883A JPWO2020018850A5 JP WO2020018850 A5 JPWO2020018850 A5 JP WO2020018850A5 JP 2021502883 A JP2021502883 A JP 2021502883A JP 2021502883 A JP2021502883 A JP 2021502883A JP WO2020018850 A5 JPWO2020018850 A5 JP WO2020018850A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- distributor
- annular array
- mixer
- central
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 127
- 230000001276 controlling effect Effects 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 13
- 230000006978 adaptation Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023215337A JP7686055B2 (ja) | 2018-07-19 | 2023-12-21 | ガス分配器および流量検証器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/040,326 US10943769B2 (en) | 2018-07-19 | 2018-07-19 | Gas distributor and flow verifier |
| US16/040,326 | 2018-07-19 | ||
| PCT/US2019/042490 WO2020018850A1 (en) | 2018-07-19 | 2019-07-18 | Gas distributor and flow verifier |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023215337A Division JP7686055B2 (ja) | 2018-07-19 | 2023-12-21 | ガス分配器および流量検証器 |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2021532581A JP2021532581A (ja) | 2021-11-25 |
| JPWO2020018850A5 true JPWO2020018850A5 (https=) | 2022-08-23 |
| JP2021532581A5 JP2021532581A5 (https=) | 2022-08-23 |
| JP7410120B2 JP7410120B2 (ja) | 2024-01-09 |
Family
ID=69162522
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021502883A Active JP7410120B2 (ja) | 2018-07-19 | 2019-07-18 | ガス分配器および流量検証器 |
| JP2023215337A Active JP7686055B2 (ja) | 2018-07-19 | 2023-12-21 | ガス分配器および流量検証器 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023215337A Active JP7686055B2 (ja) | 2018-07-19 | 2023-12-21 | ガス分配器および流量検証器 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10943769B2 (https=) |
| JP (2) | JP7410120B2 (https=) |
| KR (2) | KR102763394B1 (https=) |
| CN (2) | CN112437976B (https=) |
| TW (2) | TWI821336B (https=) |
| WO (1) | WO2020018850A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10256075B2 (en) * | 2016-01-22 | 2019-04-09 | Applied Materials, Inc. | Gas splitting by time average injection into different zones by fast gas valves |
| US10943769B2 (en) | 2018-07-19 | 2021-03-09 | Lam Research Corporation | Gas distributor and flow verifier |
| US11495486B2 (en) * | 2019-03-01 | 2022-11-08 | Lam Research Corporation | Integrated tool lift |
| CN114121585B (zh) * | 2020-08-26 | 2023-10-31 | 中微半导体设备(上海)股份有限公司 | 一种等离子体处理装置及气体供应方法 |
| US12068135B2 (en) | 2021-02-12 | 2024-08-20 | Applied Materials, Inc. | Fast gas exchange apparatus, system, and method |
| KR102627141B1 (ko) * | 2023-07-20 | 2024-01-23 | (주)효진이앤하이 | 플라즈마 가스 변환 시스템 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3442604B2 (ja) * | 1996-02-15 | 2003-09-02 | 株式会社フジキン | 混合ガスの供給方法及び混合ガス供給装置並びにこれらを備えた半導体製造装置 |
| JP4454725B2 (ja) * | 1998-12-28 | 2010-04-21 | 株式会社オムニ研究所 | ガス混合装置およびガス混合ブロック |
| JP4764574B2 (ja) * | 2001-08-31 | 2011-09-07 | 東京エレクトロン株式会社 | 処理装置の運転方法 |
| US7335396B2 (en) * | 2003-04-24 | 2008-02-26 | Micron Technology, Inc. | Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers |
| US7510624B2 (en) * | 2004-12-17 | 2009-03-31 | Applied Materials, Inc. | Self-cooling gas delivery apparatus under high vacuum for high density plasma applications |
| US20080102011A1 (en) * | 2006-10-27 | 2008-05-01 | Applied Materials, Inc. | Treatment of effluent containing chlorine-containing gas |
| CN101556904B (zh) * | 2008-04-10 | 2010-12-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种气体分配装置及应用该分配装置的半导体处理设备 |
| US8236133B2 (en) | 2008-05-05 | 2012-08-07 | Applied Materials, Inc. | Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias |
| WO2011159690A2 (en) * | 2010-06-15 | 2011-12-22 | Applied Materials, Inc. | Multiple precursor showerhead with by-pass ports |
| KR101693673B1 (ko) | 2010-06-23 | 2017-01-09 | 주성엔지니어링(주) | 가스분배수단 및 이를 포함한 기판처리장치 |
| US8528338B2 (en) * | 2010-12-06 | 2013-09-10 | General Electric Company | Method for operating an air-staged diffusion nozzle |
| JP6123208B2 (ja) * | 2012-09-28 | 2017-05-10 | 東京エレクトロン株式会社 | 成膜装置 |
| US9157730B2 (en) * | 2012-10-26 | 2015-10-13 | Applied Materials, Inc. | PECVD process |
| TW201435138A (zh) | 2012-12-21 | 2014-09-16 | Applied Materials Inc | 具高清洗效率的對稱氣體分配設備及方法 |
| US20140224175A1 (en) | 2013-02-14 | 2014-08-14 | Memc Electronic Materials, Inc. | Gas distribution manifold system for chemical vapor deposition reactors and method of use |
| US20140329185A1 (en) * | 2013-05-03 | 2014-11-06 | Uop Llc | Apparatus and method for minimizing smoke formation in a flaring stack |
| US20140329189A1 (en) * | 2013-05-03 | 2014-11-06 | Uop Llc | Apparatus and method for minimizing smoke formation in a flaring stack |
| US10167557B2 (en) | 2014-03-18 | 2019-01-01 | Asm Ip Holding B.V. | Gas distribution system, reactor including the system, and methods of using the same |
| US10128087B2 (en) * | 2014-04-07 | 2018-11-13 | Lam Research Corporation | Configuration independent gas delivery system |
| US9679749B2 (en) * | 2014-09-26 | 2017-06-13 | Lam Research Corporation | Gas distribution device with actively cooled grid |
| US10105668B2 (en) * | 2015-06-30 | 2018-10-23 | Exxonmobil Chemical Patents Inc. | Gas distribution in oxidation reactions |
| US10022689B2 (en) * | 2015-07-24 | 2018-07-17 | Lam Research Corporation | Fluid mixing hub for semiconductor processing tool |
| US10943769B2 (en) | 2018-07-19 | 2021-03-09 | Lam Research Corporation | Gas distributor and flow verifier |
-
2018
- 2018-07-19 US US16/040,326 patent/US10943769B2/en active Active
-
2019
- 2019-07-18 CN CN201980048175.0A patent/CN112437976B/zh active Active
- 2019-07-18 CN CN202510384181.0A patent/CN120332666A/zh active Pending
- 2019-07-18 KR KR1020217004928A patent/KR102763394B1/ko active Active
- 2019-07-18 TW TW108125382A patent/TWI821336B/zh active
- 2019-07-18 WO PCT/US2019/042490 patent/WO2020018850A1/en not_active Ceased
- 2019-07-18 TW TW112141223A patent/TWI893498B/zh active
- 2019-07-18 JP JP2021502883A patent/JP7410120B2/ja active Active
- 2019-07-18 KR KR1020257003258A patent/KR102932651B1/ko active Active
-
2021
- 2021-02-02 US US17/165,923 patent/US11532460B2/en active Active
-
2023
- 2023-12-21 JP JP2023215337A patent/JP7686055B2/ja active Active
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