JPWO2013069156A1 - Stage device for laser processing machine - Google Patents

Stage device for laser processing machine Download PDF

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JPWO2013069156A1
JPWO2013069156A1 JP2013542790A JP2013542790A JPWO2013069156A1 JP WO2013069156 A1 JPWO2013069156 A1 JP WO2013069156A1 JP 2013542790 A JP2013542790 A JP 2013542790A JP 2013542790 A JP2013542790 A JP 2013542790A JP WO2013069156 A1 JPWO2013069156 A1 JP WO2013069156A1
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stage
guide rail
servo motor
linear
guide
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JP6021819B2 (en
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西脇　靖樹
靖樹 西脇
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Nippon Sharyo Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

互いに平行に設置された一対のガイドレール（１５）に沿って移動するスライダ（１６）を備えたリニアガイド（１３）に両側下部が支持されたステージ（１２）と、ステージをガイドレールに沿って移動させるリニアサーボモータ（１４）とを備えたレーザ加工機用ステージ装置において、リニアサーボモータとしてコア付タイプのリニアサーボモータを使用し、リニアサーボモータの固定子（１７）をガイドレールの外側のガイドレールより高い位置にステージ側を向いた状態で配置するとともに、リニアサーボモータの移動子（１８）を、ステージの両側部で固定子のステージ側に対向する位置に配置する。これにより、ステージ自体の重量によるステージ中央部の下方への撓みを解消することができ、レーザ光による超微細加工も確実に行うことができる。  A stage (12) whose lower portions on both sides are supported by a linear guide (13) having a slider (16) that moves along a pair of guide rails (15) installed in parallel to each other, and the stage along the guide rails In a stage device for a laser beam machine having a linear servo motor (14) to be moved, a linear servo motor with a core type is used as the linear servo motor, and the stator (17) of the linear servo motor is placed outside the guide rail. The linear servo motor mover (18) is arranged at a position facing the stage side of the stator on both sides of the stage, with the stage facing the stage side higher than the guide rail. As a result, it is possible to eliminate the downward bending of the center of the stage due to the weight of the stage itself, and it is possible to reliably perform ultrafine processing using laser light.

Description

本発明は、レーザ加工機用ステージ装置に関し、詳しくは、金属薄板に微細なレーザ加工を施す際に使用するステージ装置に関する。  The present invention relates to a stage device for a laser beam machine, and more particularly to a stage device used when performing fine laser processing on a thin metal plate.

例えば、プリント配線板にクリームはんだを印刷する際に使用するメタルマスクをレーザ加工によって製造する際には、金属薄板とレーザ加工ヘッドとを相対的に移動させ、金属薄板の所定位置をレーザ光で照射することによって行われている。このような加工に使用するステージは、一般に、リニアガイドによって直線的に移動可能な状態でステージを設置するとともに、ステージ移動用の駆動源としてリニアサーボモータを使用している（例えば、特許文献１参照。）。  For example, when a metal mask used for printing cream solder on a printed wiring board is manufactured by laser processing, the metal thin plate and the laser processing head are moved relative to each other, and a predetermined position of the metal thin plate is moved by laser light. It is done by irradiating. A stage used for such processing generally has a stage installed in a linearly movable state by a linear guide and uses a linear servo motor as a stage moving drive source (for example, Patent Document 1). reference.).

特開２００４−１１２８６４号公報JP 2004-112864 A

金属薄板とレーザ加工ヘッドとを相対的に移動させる手段として、レーザ加工ヘッドを固定して金属薄板を保持したステージを移動させるものと、金属薄板を固定してレーザ加工ヘッドを搭載したステージを移動させるものとがある。金属薄板を移動させるものでは、金属薄板の面積が大きくなると、ステージの大型化や重量増加に伴って振動が発生しやすくなり、加工誤差を生じる原因となることから、レーザ加工ヘッドを移動させるものが好ましい。しかし、レーザ加工ヘッドを移動させるものでも、金属薄板の面積が大きいと、レーザ加工ヘッドを搭載するステージが長くなり、重量も増加するため、ステージ自体の重量で中央が下方に撓むことがある。ステージの撓みが僅かなものであっても、メタルマスクをレーザ加工するような超微細な加工を行う際には、数ミクロン程度の撓みでも製品の品質に影響を及ぼすことがある。  As a means to move the metal thin plate and the laser processing head relatively, the laser processing head is fixed and the stage holding the metal thin plate is moved, and the metal thin plate is fixed and the stage equipped with the laser processing head is moved. There is something to be made. When moving the metal thin plate, if the area of the metal thin plate is increased, vibration is likely to occur as the stage becomes larger and the weight is increased, which may cause processing errors. Is preferred. However, even if the laser processing head is moved, if the area of the thin metal plate is large, the stage on which the laser processing head is mounted becomes longer and the weight also increases, so the center may bend downward due to the weight of the stage itself. . Even if the stage is slightly bent, even when the metal mask is subjected to ultra-fine processing such as laser processing, even a deflection of about several microns may affect the product quality.

そこで本発明は、ステージ自体の重量によるステージ中央部の下方への撓みを解消することができ、レーザ光による超微細加工も確実に行うことが可能なレーザ加工機用ステージ装置を提供することを目的としている。  Accordingly, the present invention provides a stage device for a laser beam machine capable of eliminating the downward deflection of the center portion of the stage due to the weight of the stage itself and capable of performing ultrafine machining with laser light with certainty. It is aimed.

上記目的を達成するため、本発明のレーザ加工機用ステージ装置は、互いに平行に設置された一対のガイドレールと、各ガイドレールにそれぞれガイドされてガイドレールに沿って移動するスライダとを備えたリニアガイドに両側下部が支持されて前記ガイドレールの長手方向に移動可能に設けられたステージと、該ステージを前記ガイドレールに沿って移動させるリニアサーボモータとを備えたレーザ加工機用ステージ装置において、前記リニアサーボモータとしてコア付タイプのリニアサーボモータを使用し、該リニアサーボモータの固定子を前記ガイドレールの外側で該ガイドレールより高い位置に各ガイドレールと平行にしてステージ側を向いた状態でそれぞれ配置するとともに、前記リニアサーボモータの移動子を、前記ステージの両側部で前記固定子のステージ側に対向する位置に配置したことを特徴としている。  In order to achieve the above object, a stage device for a laser beam machine according to the present invention includes a pair of guide rails installed in parallel to each other, and a slider that is guided by each guide rail and moves along the guide rail. In a stage device for a laser processing machine, comprising: a stage that is supported by a linear guide at both lower portions and movable in the longitudinal direction of the guide rail; and a linear servo motor that moves the stage along the guide rail. A linear servo motor with a core is used as the linear servo motor, and the stator of the linear servo motor is positioned outside the guide rail at a position higher than the guide rail in parallel with each guide rail and facing the stage side. Each of the linear servo motor mover and the stage Is characterized in that at both sides is arranged at a position facing the stage side of the stator.

本発明のレーザ加工機用ステージ装置によれば、一対のガイドレールの外側上方位置に配置した固定子と、ステージの両側部に装着した移動子との吸引力により、ガイドレールより高い位置でステージを両側から引っ張る力が発生するので、ステージの中央部がステージ自体の重量によって下方に撓むことを防止できる。  According to the stage device for a laser beam machine of the present invention, the stage is positioned at a position higher than the guide rail by the suction force between the stator arranged at the upper position outside the pair of guide rails and the mover mounted on both sides of the stage. Since the force which pulls from both sides generate | occur | produces, it can prevent that the center part of a stage bends downward with the weight of stage itself.

本発明のレーザ加工機用ステージ装置の一形態例を示す要部の正面図である。It is a front view of the principal part which shows one form example of the stage apparatus for laser processing machines of this invention. 同じくステージ装置の正面図である。It is a front view of a stage apparatus similarly. 同じくステージ装置の平面図である。It is a top view of a stage apparatus similarly.

本形態例に示すレーザ加工機用ステージ装置は、基台１１の両側部分に、門型構造のステージ１２を移動可能に支持するためのリニアガイド１３と、ステージ１２を移動させるための駆動源となるリニアサーボモータ１４とをそれぞれ備えている。リニアガイド１３は、互いに平行に設置された一対のガイドレール１５，１５と、各ガイドレール１５，１５にそれぞれガイドされてガイドレール１５の長手方向に移動するスライダ１６，１６とを備えており、スライダ１６は、ステージ１２のテーブル部１２ａの両側下部に形成された脚部１２ｂの下面に装着され、ガイドレール１５の上方からガイドレール１５に跨がるようにして設けられている。  The stage device for a laser beam machine shown in the present embodiment includes a linear guide 13 for movably supporting a stage 12 having a portal structure on both sides of a base 11, and a drive source for moving the stage 12. Each linear servo motor 14 is provided. The linear guide 13 includes a pair of guide rails 15 and 15 installed in parallel to each other, and sliders 16 and 16 that are guided by the guide rails 15 and 15 and move in the longitudinal direction of the guide rail 15, respectively. The slider 16 is mounted on the lower surface of the leg portion 12b formed at the lower part on both sides of the table portion 12a of the stage 12, and is provided so as to straddle the guide rail 15 from above the guide rail 15.

前記リニアサーボモータ１４は、コア付タイプのリニアサーボモータであって、磁極を交互に併設した固定子１７と、コアに導線を巻回した移動子１８とで構成されている。前記固定子１７は、前記ガイドレール１５の外側に立ち上がった支持部材１１ａの内面（ステージ側面）に、ガイドレール１５よりも高い位置で、ステージ１２側を向いた状態で、ガイドレール１５と平行に、ガイドレール１５に沿った状態で基台１１の全長にわたって配置されている。また、前記移動子１８は、前記ステージ１２における上部外面、すなわち、脚部１２ｂの上部のテーブル部１２ａの両側部であって、前記ガイドレール１５より高い位置で、前記固定子１７のステージ１２側に対向した状態になる位置にそれぞれ装着されており、ガイドレール１５と移動子１８との間には、所定の間隔が設けられている。  The linear servo motor 14 is a core type linear servo motor, and includes a stator 17 in which magnetic poles are alternately provided, and a mover 18 in which a conductor is wound around a core. The stator 17 is parallel to the guide rail 15 in a state where it faces the stage 12 side at a position higher than the guide rail 15 on the inner surface (stage side surface) of the support member 11a rising outside the guide rail 15. The base 11 is arranged along the guide rail 15 over the entire length. The moving element 18 is located on the stage 12 side of the stator 17 at a position higher than the guide rail 15 on the upper outer surface of the stage 12, that is, on both sides of the table part 12a above the leg part 12b. The guide rail 15 and the moving element 18 are each provided with a predetermined interval.

このように、リニアガイド１３のガイドレール１５に上方から跨がるように形成したスライダ１６を介して門型構造のステージ１２をガイドレール１５に沿って移動可能に設けるとともに、ガイドレール１５より上方の基台１１の支持部材１１ａとステージ１２のテーブル部１２ａとの間に、コア付タイプのリニアサーボモータ１４を対向面が鉛直方向を向くようにして横向きに配置することにより、リニアサーボモータ１４における固定子１７と移動子１８との間に磁力によって、ガイドレール１５より高い位置でステージ１２を両側から引っ張る方向の大きな吸引力が発生する。  As described above, the stage 12 having the portal structure is movably provided along the guide rail 15 via the slider 16 formed so as to straddle the guide rail 15 of the linear guide 13 from above, and above the guide rail 15. Between the support member 11a of the base 11 and the table portion 12a of the stage 12, a linear servo motor 14 with a core is disposed sideways so that the opposing surface faces the vertical direction. Due to the magnetic force between the stator 17 and the mover 18, a large suction force is generated in the direction of pulling the stage 12 from both sides at a position higher than the guide rail 15.

これにより、自重によってステージ１２の中央部が下方に撓む際に脚部１２ｂの上部に加わるステージ１２の中心方向への力を、前記リニアサーボモータ１４の固定子１７と移動子１８との間の吸引力で打ち消すことができ、脚部１２ｂを直立状態に保持してステージ１２の中央部が自重で下方に撓むことを防止することができる。  As a result, when the center portion of the stage 12 bends downward due to its own weight, a force in the center direction of the stage 12 applied to the upper portion of the leg portion 12b is applied between the stator 17 and the movable element 18 of the linear servo motor 14. It is possible to counteract with the suction force of the above, and it is possible to prevent the center portion of the stage 12 from being bent downward by its own weight by holding the leg portion 12b in an upright state.

したがって、ステージ１２の平面度を保つことができ、ステージ１２に搭載されてガイド２１に沿ってステージ１２の長手方向に移動するレーザ加工ヘッド２２の上下方向位置を一定に保つことができる。これにより、レーザ加工ヘッド２２の下方に配置された金属薄板とレーザ加工ヘッド２２との距離がレーザ加工ヘッド２２の移動位置に関係なく一定となり、金属薄板に超微細な加工を施してメタルマスクを形成する際の加工精度を確保することができ、品質の安定化や歩留まりの向上を図ることができる。  Therefore, the flatness of the stage 12 can be maintained, and the vertical position of the laser processing head 22 mounted on the stage 12 and moving in the longitudinal direction of the stage 12 along the guide 21 can be kept constant. As a result, the distance between the metal thin plate disposed below the laser processing head 22 and the laser processing head 22 becomes constant regardless of the movement position of the laser processing head 22, and the metal mask is formed by subjecting the metal thin plate to ultrafine processing. Processing accuracy at the time of forming can be ensured, and the quality can be stabilized and the yield can be improved.

前記リニアガイド１３のガイドレール１５に対するコア付タイプのリニアサーボモータ１４の高さは、ステージ１２の重量や剛性、一対のガイドレール１５，１５間の距離、撓み許容量、固定子１７と移動子１８との間の吸引力などの各種条件に応じて設定することが可能であるが、ステージ１２のテーブル部の両端を両側から一直線状に引っ張る状態になる位置に配置することが好ましい。  The height of the linear servomotor 14 with a core relative to the guide rail 15 of the linear guide 13 is the weight and rigidity of the stage 12, the distance between the pair of guide rails 15 and 15, the allowable deflection, the stator 17 and the mover. Although it can be set according to various conditions such as a suction force between the two ends, it is preferable to dispose both ends of the table portion of the stage 12 at positions where the both ends are pulled straight from both sides.

なお、ステージ装置としての位置検出手段や移動制御手段は特に限定されるものではなく、ステージ装置の使用目的も任意である。  The position detection means and movement control means as the stage device are not particularly limited, and the purpose of use of the stage device is also arbitrary.

１１…基台、１１ａ…支持部材、１２…ステージ、１２ａ…テーブル部、１２ｂ…脚部、１３…リニアガイド、１４…リニアサーボモータ、１５…ガイドレール、１６…スライダ、１７…固定子、１８…移動子、２１…ガイド、２２…レーザ加工ヘッド  DESCRIPTION OF SYMBOLS 11 ... Base, 11a ... Support member, 12 ... Stage, 12a ... Table part, 12b ... Leg part, 13 ... Linear guide, 14 ... Linear servo motor, 15 ... Guide rail, 16 ... Slider, 17 ... Stator, 18 ... Mover, 21 ... Guide, 22 ... Laser processing head

Claims (1)

互いに平行に設置された一対のガイドレールと、各ガイドレールにそれぞれガイドされてガイドレールに沿って移動するスライダとを備えたリニアガイドに両側下部が支持されて前記ガイドレールの長手方向に移動可能に設けられたステージと、該ステージを前記ガイドレールに沿って移動させるリニアサーボモータとを備えたレーザ加工機用ステージ装置において、前記リニアサーボモータとしてコア付タイプのリニアサーボモータを使用し、該リニアサーボモータの固定子を前記ガイドレールの外側で該ガイドレールより高い位置に各ガイドレールと平行にしてステージ側を向いた状態でそれぞれ配置するとともに、前記リニアサーボモータの移動子を、前記ステージの両側部で前記固定子のステージ側に対向する位置に配置したことを特徴とするレーザ加工機用ステージ装置。  The lower part of each side is supported by a linear guide that has a pair of guide rails installed parallel to each other and a slider that is guided by each guide rail and moves along the guide rails. In a stage device for a laser processing machine provided with a stage provided on a linear servomotor for moving the stage along the guide rail, a linear servomotor with a core is used as the linear servomotor, The linear servo motor stator is arranged outside the guide rail at a position higher than the guide rail in parallel with each guide rail and facing the stage side, and the linear servo motor mover is placed on the stage. Arranged on the opposite sides of the stator on the stage side. Laser machine for stage apparatus according to symptoms.
JP2013542790A 2011-11-11 2011-11-11 Stage device for laser processing machine Active JP6021819B2 (en)

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JP6021819B2 (en) 2016-11-09
CN103930236B (en) 2015-12-16
WO2013069156A1 (en) 2013-05-16
CN103930236A (en) 2014-07-16
HK1199631A1 (en) 2015-07-10

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