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JPS6490548A - Semiconductor capacitance element - Google Patents

Semiconductor capacitance element

Info

Publication number
JPS6490548A
JPS6490548A JP24883687A JP24883687A JPS6490548A JP S6490548 A JPS6490548 A JP S6490548A JP 24883687 A JP24883687 A JP 24883687A JP 24883687 A JP24883687 A JP 24883687A JP S6490548 A JPS6490548 A JP S6490548A
Authority
JP
JAPAN
Prior art keywords
metallic
layer
conductor layer
wiring layer
capacitance element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24883687A
Inventor
Atsushi Iida
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP24883687A priority Critical patent/JPS6490548A/en
Publication of JPS6490548A publication Critical patent/JPS6490548A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE:To prevent the disconnection of a metallic wiring layer and the deterio ration in characteristics as a capacitance element by electrically connecting a second conductor layer and the metallic wiring layer by a conductor layer composed of a metal or a metallic compound different from a metallic wiring. CONSTITUTION:A contact opening window 6 for an insulator layer 5 is formed to the upper section of a second conductor layer 4. A conductor layer. 9 consisting of a metal such as titanium, molybdenum, etc., or a metallic com pound such as titanium nitride, molybdenum silicide, etc., is shaped to the open ing window 6. A metallic wiring layer 7 is formed onto the conductor layer 9. Consequently, a large quantity of metallic atoms in the wiring layer 7 are diffused and moved. Accordingly, the disconnection of the wiring layer 7 and the deterioration of characteristics as a capacitance element are prevented.
JP24883687A 1987-10-01 1987-10-01 Semiconductor capacitance element Pending JPS6490548A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24883687A JPS6490548A (en) 1987-10-01 1987-10-01 Semiconductor capacitance element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24883687A JPS6490548A (en) 1987-10-01 1987-10-01 Semiconductor capacitance element

Publications (1)

Publication Number Publication Date
JPS6490548A true JPS6490548A (en) 1989-04-07

Family

ID=17184144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24883687A Pending JPS6490548A (en) 1987-10-01 1987-10-01 Semiconductor capacitance element

Country Status (1)

Country Link
JP (1) JPS6490548A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312334A (en) * 1992-01-06 1994-05-17 Sharp Kabushiki Kaisha Peristaltic pump apparatus having an improved misloaded IV tube detecting circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312334A (en) * 1992-01-06 1994-05-17 Sharp Kabushiki Kaisha Peristaltic pump apparatus having an improved misloaded IV tube detecting circuit

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