JPS6486347A - Production of magneto-optical recording film - Google Patents
Production of magneto-optical recording filmInfo
- Publication number
- JPS6486347A JPS6486347A JP24265687A JP24265687A JPS6486347A JP S6486347 A JPS6486347 A JP S6486347A JP 24265687 A JP24265687 A JP 24265687A JP 24265687 A JP24265687 A JP 24265687A JP S6486347 A JPS6486347 A JP S6486347A
- Authority
- JP
- Japan
- Prior art keywords
- alloy target
- intensity
- target
- obtd
- max
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thin Magnetic Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242656A JP2550098B2 (ja) | 1987-09-29 | 1987-09-29 | 光磁気記録膜の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242656A JP2550098B2 (ja) | 1987-09-29 | 1987-09-29 | 光磁気記録膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6486347A true JPS6486347A (en) | 1989-03-31 |
JP2550098B2 JP2550098B2 (ja) | 1996-10-30 |
Family
ID=17092287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62242656A Expired - Lifetime JP2550098B2 (ja) | 1987-09-29 | 1987-09-29 | 光磁気記録膜の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2550098B2 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55146925A (en) * | 1979-05-04 | 1980-11-15 | Toshiba Corp | Manufacturing of magnetic film |
JPS57160113A (en) * | 1981-03-27 | 1982-10-02 | Ulvac Corp | High speed sputtering apparatus for ferromagnetic body |
JPS63121660A (ja) * | 1986-11-10 | 1988-05-25 | Sony Corp | マグネトロンスパツタリング装置 |
-
1987
- 1987-09-29 JP JP62242656A patent/JP2550098B2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55146925A (en) * | 1979-05-04 | 1980-11-15 | Toshiba Corp | Manufacturing of magnetic film |
JPS57160113A (en) * | 1981-03-27 | 1982-10-02 | Ulvac Corp | High speed sputtering apparatus for ferromagnetic body |
JPS63121660A (ja) * | 1986-11-10 | 1988-05-25 | Sony Corp | マグネトロンスパツタリング装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2550098B2 (ja) | 1996-10-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 11 Free format text: PAYMENT UNTIL: 20070808 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080808 Year of fee payment: 12 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 12 Free format text: PAYMENT UNTIL: 20080808 |