JPS6486347A - Production of magneto-optical recording film - Google Patents

Production of magneto-optical recording film

Info

Publication number
JPS6486347A
JPS6486347A JP24265687A JP24265687A JPS6486347A JP S6486347 A JPS6486347 A JP S6486347A JP 24265687 A JP24265687 A JP 24265687A JP 24265687 A JP24265687 A JP 24265687A JP S6486347 A JPS6486347 A JP S6486347A
Authority
JP
Japan
Prior art keywords
alloy target
intensity
target
obtd
max
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24265687A
Other languages
English (en)
Other versions
JP2550098B2 (ja
Inventor
Katsutaro Ichihara
Sumio Ashida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62242656A priority Critical patent/JP2550098B2/ja
Publication of JPS6486347A publication Critical patent/JPS6486347A/ja
Application granted granted Critical
Publication of JP2550098B2 publication Critical patent/JP2550098B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Thin Magnetic Films (AREA)
JP62242656A 1987-09-29 1987-09-29 光磁気記録膜の製造方法 Expired - Lifetime JP2550098B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62242656A JP2550098B2 (ja) 1987-09-29 1987-09-29 光磁気記録膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62242656A JP2550098B2 (ja) 1987-09-29 1987-09-29 光磁気記録膜の製造方法

Publications (2)

Publication Number Publication Date
JPS6486347A true JPS6486347A (en) 1989-03-31
JP2550098B2 JP2550098B2 (ja) 1996-10-30

Family

ID=17092287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62242656A Expired - Lifetime JP2550098B2 (ja) 1987-09-29 1987-09-29 光磁気記録膜の製造方法

Country Status (1)

Country Link
JP (1) JP2550098B2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146925A (en) * 1979-05-04 1980-11-15 Toshiba Corp Manufacturing of magnetic film
JPS57160113A (en) * 1981-03-27 1982-10-02 Ulvac Corp High speed sputtering apparatus for ferromagnetic body
JPS63121660A (ja) * 1986-11-10 1988-05-25 Sony Corp マグネトロンスパツタリング装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146925A (en) * 1979-05-04 1980-11-15 Toshiba Corp Manufacturing of magnetic film
JPS57160113A (en) * 1981-03-27 1982-10-02 Ulvac Corp High speed sputtering apparatus for ferromagnetic body
JPS63121660A (ja) * 1986-11-10 1988-05-25 Sony Corp マグネトロンスパツタリング装置

Also Published As

Publication number Publication date
JP2550098B2 (ja) 1996-10-30

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