JPS647552A - Manufacture of complementary mos semiconductor device - Google Patents

Manufacture of complementary mos semiconductor device

Info

Publication number
JPS647552A
JPS647552A JP62161074A JP16107487A JPS647552A JP S647552 A JPS647552 A JP S647552A JP 62161074 A JP62161074 A JP 62161074A JP 16107487 A JP16107487 A JP 16107487A JP S647552 A JPS647552 A JP S647552A
Authority
JP
Japan
Prior art keywords
cvd film
region
coating material
concentration impurity
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62161074A
Other languages
English (en)
Inventor
Takeshi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP62161074A priority Critical patent/JPS647552A/ja
Publication of JPS647552A publication Critical patent/JPS647552A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP62161074A 1987-06-30 1987-06-30 Manufacture of complementary mos semiconductor device Pending JPS647552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62161074A JPS647552A (en) 1987-06-30 1987-06-30 Manufacture of complementary mos semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62161074A JPS647552A (en) 1987-06-30 1987-06-30 Manufacture of complementary mos semiconductor device

Publications (1)

Publication Number Publication Date
JPS647552A true JPS647552A (en) 1989-01-11

Family

ID=15728130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62161074A Pending JPS647552A (en) 1987-06-30 1987-06-30 Manufacture of complementary mos semiconductor device

Country Status (1)

Country Link
JP (1) JPS647552A (ja)

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