JPS646397A - Forming method for ferroelectric thin film - Google Patents
Forming method for ferroelectric thin filmInfo
- Publication number
- JPS646397A JPS646397A JP62160363A JP16036387A JPS646397A JP S646397 A JPS646397 A JP S646397A JP 62160363 A JP62160363 A JP 62160363A JP 16036387 A JP16036387 A JP 16036387A JP S646397 A JPS646397 A JP S646397A
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet rays
- board
- filming
- film
- pbtio3
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62160363A JPS646397A (en) | 1987-06-26 | 1987-06-26 | Forming method for ferroelectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62160363A JPS646397A (en) | 1987-06-26 | 1987-06-26 | Forming method for ferroelectric thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS646397A true JPS646397A (en) | 1989-01-10 |
Family
ID=15713354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62160363A Pending JPS646397A (en) | 1987-06-26 | 1987-06-26 | Forming method for ferroelectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS646397A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06168879A (ja) * | 1992-12-01 | 1994-06-14 | Matsushita Electric Ind Co Ltd | 誘電体薄膜の製造方法 |
JP2003133605A (ja) * | 2001-10-26 | 2003-05-09 | Matsushita Electric Ind Co Ltd | 強誘電体素子およびそれを用いたアクチュエータ、インクジェットヘッドならびにインクジェット記録装置 |
CN114717529A (zh) * | 2022-04-13 | 2022-07-08 | 华南理工大学 | 一种反应磁控溅射系统中的紫外辅助沉积装置及沉积方法 |
-
1987
- 1987-06-26 JP JP62160363A patent/JPS646397A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06168879A (ja) * | 1992-12-01 | 1994-06-14 | Matsushita Electric Ind Co Ltd | 誘電体薄膜の製造方法 |
JP2003133605A (ja) * | 2001-10-26 | 2003-05-09 | Matsushita Electric Ind Co Ltd | 強誘電体素子およびそれを用いたアクチュエータ、インクジェットヘッドならびにインクジェット記録装置 |
CN114717529A (zh) * | 2022-04-13 | 2022-07-08 | 华南理工大学 | 一种反应磁控溅射系统中的紫外辅助沉积装置及沉积方法 |
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