JPS646397A - Forming method for ferroelectric thin film - Google Patents

Forming method for ferroelectric thin film

Info

Publication number
JPS646397A
JPS646397A JP62160363A JP16036387A JPS646397A JP S646397 A JPS646397 A JP S646397A JP 62160363 A JP62160363 A JP 62160363A JP 16036387 A JP16036387 A JP 16036387A JP S646397 A JPS646397 A JP S646397A
Authority
JP
Japan
Prior art keywords
ultraviolet rays
board
filming
film
pbtio3
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62160363A
Other languages
English (en)
Inventor
Junichi Watabe
Masayuki Wakitani
Tadashi Hasegawa
Kiyotake Sato
Riyoushirou Katayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62160363A priority Critical patent/JPS646397A/ja
Publication of JPS646397A publication Critical patent/JPS646397A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP62160363A 1987-06-26 1987-06-26 Forming method for ferroelectric thin film Pending JPS646397A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62160363A JPS646397A (en) 1987-06-26 1987-06-26 Forming method for ferroelectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62160363A JPS646397A (en) 1987-06-26 1987-06-26 Forming method for ferroelectric thin film

Publications (1)

Publication Number Publication Date
JPS646397A true JPS646397A (en) 1989-01-10

Family

ID=15713354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62160363A Pending JPS646397A (en) 1987-06-26 1987-06-26 Forming method for ferroelectric thin film

Country Status (1)

Country Link
JP (1) JPS646397A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06168879A (ja) * 1992-12-01 1994-06-14 Matsushita Electric Ind Co Ltd 誘電体薄膜の製造方法
JP2003133605A (ja) * 2001-10-26 2003-05-09 Matsushita Electric Ind Co Ltd 強誘電体素子およびそれを用いたアクチュエータ、インクジェットヘッドならびにインクジェット記録装置
CN114717529A (zh) * 2022-04-13 2022-07-08 华南理工大学 一种反应磁控溅射系统中的紫外辅助沉积装置及沉积方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06168879A (ja) * 1992-12-01 1994-06-14 Matsushita Electric Ind Co Ltd 誘電体薄膜の製造方法
JP2003133605A (ja) * 2001-10-26 2003-05-09 Matsushita Electric Ind Co Ltd 強誘電体素子およびそれを用いたアクチュエータ、インクジェットヘッドならびにインクジェット記録装置
CN114717529A (zh) * 2022-04-13 2022-07-08 华南理工大学 一种反应磁控溅射系统中的紫外辅助沉积装置及沉积方法

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