JPS645445U - - Google Patents

Info

Publication number
JPS645445U
JPS645445U JP9984087U JP9984087U JPS645445U JP S645445 U JPS645445 U JP S645445U JP 9984087 U JP9984087 U JP 9984087U JP 9984087 U JP9984087 U JP 9984087U JP S645445 U JPS645445 U JP S645445U
Authority
JP
Japan
Prior art keywords
pattern
suction
semiconductor wafer
periphery
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9984087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9984087U priority Critical patent/JPS645445U/ja
Publication of JPS645445U publication Critical patent/JPS645445U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP9984087U 1987-06-29 1987-06-29 Pending JPS645445U (US20020128544A1-20020912-P00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9984087U JPS645445U (US20020128544A1-20020912-P00008.png) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9984087U JPS645445U (US20020128544A1-20020912-P00008.png) 1987-06-29 1987-06-29

Publications (1)

Publication Number Publication Date
JPS645445U true JPS645445U (US20020128544A1-20020912-P00008.png) 1989-01-12

Family

ID=31327372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9984087U Pending JPS645445U (US20020128544A1-20020912-P00008.png) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPS645445U (US20020128544A1-20020912-P00008.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316803U (US20020128544A1-20020912-P00008.png) * 1989-06-30 1991-02-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316803U (US20020128544A1-20020912-P00008.png) * 1989-06-30 1991-02-20

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