JPS6454379A - Probe substrate for measuring semiconductor integrated circuit - Google Patents
Probe substrate for measuring semiconductor integrated circuitInfo
- Publication number
- JPS6454379A JPS6454379A JP62211665A JP21166587A JPS6454379A JP S6454379 A JPS6454379 A JP S6454379A JP 62211665 A JP62211665 A JP 62211665A JP 21166587 A JP21166587 A JP 21166587A JP S6454379 A JPS6454379 A JP S6454379A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- charging
- output
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 239000000523 sample Substances 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 title 1
- 238000007599 discharging Methods 0.000 abstract 3
- 239000003990 capacitor Substances 0.000 abstract 2
- 230000007257 malfunction Effects 0.000 abstract 2
- 238000005259 measurement Methods 0.000 abstract 2
- 230000003071 parasitic effect Effects 0.000 abstract 2
- 239000013256 coordination polymer Substances 0.000 abstract 1
- 230000007423 decrease Effects 0.000 abstract 1
- 238000003780 insertion Methods 0.000 abstract 1
- 230000037431 insertion Effects 0.000 abstract 1
- 230000001052 transient effect Effects 0.000 abstract 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
PURPOSE:To preclude malfunction due to the charging and discharging of a measurement system parasitic capacitor at the time of a function test of a semiconductor integrated circuit by inserting an impedance element in series with a probe. CONSTITUTION:The impedance element (resistance 4) is inserted in series with the probe 3 corresponding to the output terminal of the semiconductor integrated circuit to be measured which is provided to an insulating plate 1. On the other hand, when the output impedance of the semiconductor integrated circuit is denoted as R0, the charging and discharging time constant T of the measurement system parasitic capacitor CP when an output signal is inverted is CPR0. This charging and discharging time constant T increases by the insertion of a resistance 4 and the peak value of a transient current when the output is inverted decreases as a result. Noises on the power lines of the semiconductor integrated circuit to be measured are therefore improved correspondingly and malfunction at the time of the function test is precluded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62211665A JP2703904B2 (en) | 1987-08-26 | 1987-08-26 | Probe substrate for semiconductor integrated circuit measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62211665A JP2703904B2 (en) | 1987-08-26 | 1987-08-26 | Probe substrate for semiconductor integrated circuit measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6454379A true JPS6454379A (en) | 1989-03-01 |
| JP2703904B2 JP2703904B2 (en) | 1998-01-26 |
Family
ID=16609566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62211665A Expired - Lifetime JP2703904B2 (en) | 1987-08-26 | 1987-08-26 | Probe substrate for semiconductor integrated circuit measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2703904B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04266043A (en) * | 1990-10-31 | 1992-09-22 | Hughes Aircraft Co | Apparatus and method for test of integrated circuit |
| JPH05309260A (en) * | 1991-04-22 | 1993-11-22 | L'oreal Sa | Coated porous microsphere and cosmetic composition containing same |
| JP2010043898A (en) * | 2008-08-11 | 2010-02-25 | Ngk Spark Plug Co Ltd | Wiring board, wiring board for ic electrical characteristics inspection, and manufacturing method of the wiring board |
| JP2010151560A (en) * | 2008-12-25 | 2010-07-08 | Japan Electronic Materials Corp | Probe card |
| US9266826B2 (en) | 2012-01-31 | 2016-02-23 | Shiseido Company, Ltd. | Separating agent and manufacturing method thereof |
| US9347031B2 (en) | 2009-06-15 | 2016-05-24 | Shiseido Company, Ltd. | Container for forming a cell aggregate and a method for forming a cell aggregate |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5717142U (en) * | 1980-07-03 | 1982-01-28 |
-
1987
- 1987-08-26 JP JP62211665A patent/JP2703904B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5717142U (en) * | 1980-07-03 | 1982-01-28 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04266043A (en) * | 1990-10-31 | 1992-09-22 | Hughes Aircraft Co | Apparatus and method for test of integrated circuit |
| JPH05309260A (en) * | 1991-04-22 | 1993-11-22 | L'oreal Sa | Coated porous microsphere and cosmetic composition containing same |
| JP2010043898A (en) * | 2008-08-11 | 2010-02-25 | Ngk Spark Plug Co Ltd | Wiring board, wiring board for ic electrical characteristics inspection, and manufacturing method of the wiring board |
| JP2010151560A (en) * | 2008-12-25 | 2010-07-08 | Japan Electronic Materials Corp | Probe card |
| US9347031B2 (en) | 2009-06-15 | 2016-05-24 | Shiseido Company, Ltd. | Container for forming a cell aggregate and a method for forming a cell aggregate |
| US9266826B2 (en) | 2012-01-31 | 2016-02-23 | Shiseido Company, Ltd. | Separating agent and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2703904B2 (en) | 1998-01-26 |
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