JPS6453750U - - Google Patents

Info

Publication number

JPS6453750U

JPS6453750U JP14787687U JP14787687U JPS6453750U JP S6453750 U JPS6453750 U JP S6453750U JP 14787687 U JP14787687 U JP 14787687U JP 14787687 U JP14787687 U JP 14787687U JP S6453750 U JPS6453750 U JP S6453750U

Authority

JP

Japan

Prior art keywords

substrate

electron beam

evaporation source

beam evaporation

vapor deposition

Prior art date

1987-09-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 7
• 238000005566 electron beam evaporation Methods 0.000 claims description 3
• 238000007740 vapor deposition Methods 0.000 claims description 2
• 238000007738 vacuum evaporation Methods 0.000 claims 1
• 230000008020 evaporation Effects 0.000 description 2
• 238000001704 evaporation Methods 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 238000010894 electron beam technology Methods 0.000 description 1
• 238000012544 monitoring process Methods 0.000 description 1

Cited By (1)