JPS6453569A - Matrix wiring structure of image sensor - Google Patents

Matrix wiring structure of image sensor

Info

Publication number
JPS6453569A
JPS6453569A JP62210514A JP21051487A JPS6453569A JP S6453569 A JPS6453569 A JP S6453569A JP 62210514 A JP62210514 A JP 62210514A JP 21051487 A JP21051487 A JP 21051487A JP S6453569 A JPS6453569 A JP S6453569A
Authority
JP
Japan
Prior art keywords
insulating film
layer
edge
layer insulating
wiring structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62210514A
Other languages
Japanese (ja)
Inventor
Daisuke Kobayashi
Hidetaka Sonohata
Tadashi Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic System Solutions Japan Co Ltd
Original Assignee
Matsushita Graphic Communication Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Graphic Communication Systems Inc filed Critical Matsushita Graphic Communication Systems Inc
Priority to JP62210514A priority Critical patent/JPS6453569A/en
Publication of JPS6453569A publication Critical patent/JPS6453569A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To form a high reliability intermediate layer insulating film and a high reliability upper wiring pattern without any broken line by forming the edge part of the insulating film made thin stepwise in the thickness thereof in a matrix wiring structure for connecting upper and lower layer wiring patterns with each other at a portion where there is no insulating film. CONSTITUTION:A necessary insulating part on an individual electrode 4 is covered with polyimide resin, etc., as a first layer insulating film 6a. A second layer insulating film 6b is formed on the first layer insulating film 6a so as for the edge of the second layer insulating film to be slightly out of the edge of the first layer insulating film. A third insulating film 6c is formed on the second layer insulating film 6b so as to be slightly out of the edge of the second layer. Hereby, even if the whole thickness of a three-layered insulating film 6 is sufficiently large, the respective thicknesses of the edge parts become progressively smaller. An upper layer wiring pattern is formed on the insulating film 6, and an output electrode 7 is connected with the individual electrode 4 at a portion where there is no insulating film 6.
JP62210514A 1987-08-25 1987-08-25 Matrix wiring structure of image sensor Pending JPS6453569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62210514A JPS6453569A (en) 1987-08-25 1987-08-25 Matrix wiring structure of image sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62210514A JPS6453569A (en) 1987-08-25 1987-08-25 Matrix wiring structure of image sensor

Publications (1)

Publication Number Publication Date
JPS6453569A true JPS6453569A (en) 1989-03-01

Family

ID=16590633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62210514A Pending JPS6453569A (en) 1987-08-25 1987-08-25 Matrix wiring structure of image sensor

Country Status (1)

Country Link
JP (1) JPS6453569A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007096282A (en) * 2005-08-31 2007-04-12 Canon Inc Radiation detecting apparatus, radiation imaging apparatus and radiation imaging system
JP2012199551A (en) * 2005-08-31 2012-10-18 Canon Inc Radiation detecting apparatus, radiation imaging apparatus and radiation imaging system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007096282A (en) * 2005-08-31 2007-04-12 Canon Inc Radiation detecting apparatus, radiation imaging apparatus and radiation imaging system
JP2012199551A (en) * 2005-08-31 2012-10-18 Canon Inc Radiation detecting apparatus, radiation imaging apparatus and radiation imaging system

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