JPS6453569A - Matrix wiring structure of image sensor - Google Patents
Matrix wiring structure of image sensorInfo
- Publication number
- JPS6453569A JPS6453569A JP62210514A JP21051487A JPS6453569A JP S6453569 A JPS6453569 A JP S6453569A JP 62210514 A JP62210514 A JP 62210514A JP 21051487 A JP21051487 A JP 21051487A JP S6453569 A JPS6453569 A JP S6453569A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- layer
- edge
- layer insulating
- wiring structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To form a high reliability intermediate layer insulating film and a high reliability upper wiring pattern without any broken line by forming the edge part of the insulating film made thin stepwise in the thickness thereof in a matrix wiring structure for connecting upper and lower layer wiring patterns with each other at a portion where there is no insulating film. CONSTITUTION:A necessary insulating part on an individual electrode 4 is covered with polyimide resin, etc., as a first layer insulating film 6a. A second layer insulating film 6b is formed on the first layer insulating film 6a so as for the edge of the second layer insulating film to be slightly out of the edge of the first layer insulating film. A third insulating film 6c is formed on the second layer insulating film 6b so as to be slightly out of the edge of the second layer. Hereby, even if the whole thickness of a three-layered insulating film 6 is sufficiently large, the respective thicknesses of the edge parts become progressively smaller. An upper layer wiring pattern is formed on the insulating film 6, and an output electrode 7 is connected with the individual electrode 4 at a portion where there is no insulating film 6.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62210514A JPS6453569A (en) | 1987-08-25 | 1987-08-25 | Matrix wiring structure of image sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62210514A JPS6453569A (en) | 1987-08-25 | 1987-08-25 | Matrix wiring structure of image sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6453569A true JPS6453569A (en) | 1989-03-01 |
Family
ID=16590633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62210514A Pending JPS6453569A (en) | 1987-08-25 | 1987-08-25 | Matrix wiring structure of image sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6453569A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007096282A (en) * | 2005-08-31 | 2007-04-12 | Canon Inc | Radiation detecting apparatus, radiation imaging apparatus and radiation imaging system |
JP2012199551A (en) * | 2005-08-31 | 2012-10-18 | Canon Inc | Radiation detecting apparatus, radiation imaging apparatus and radiation imaging system |
-
1987
- 1987-08-25 JP JP62210514A patent/JPS6453569A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007096282A (en) * | 2005-08-31 | 2007-04-12 | Canon Inc | Radiation detecting apparatus, radiation imaging apparatus and radiation imaging system |
JP2012199551A (en) * | 2005-08-31 | 2012-10-18 | Canon Inc | Radiation detecting apparatus, radiation imaging apparatus and radiation imaging system |
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