JPS6448023U - - Google Patents

Info

Publication number
JPS6448023U
JPS6448023U JP14505787U JP14505787U JPS6448023U JP S6448023 U JPS6448023 U JP S6448023U JP 14505787 U JP14505787 U JP 14505787U JP 14505787 U JP14505787 U JP 14505787U JP S6448023 U JPS6448023 U JP S6448023U
Authority
JP
Japan
Prior art keywords
furnace mouth
mouth portion
vertical device
insulating material
heat insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14505787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14505787U priority Critical patent/JPS6448023U/ja
Publication of JPS6448023U publication Critical patent/JPS6448023U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP14505787U 1987-09-21 1987-09-21 Pending JPS6448023U (US08087162-20120103-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14505787U JPS6448023U (US08087162-20120103-C00010.png) 1987-09-21 1987-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14505787U JPS6448023U (US08087162-20120103-C00010.png) 1987-09-21 1987-09-21

Publications (1)

Publication Number Publication Date
JPS6448023U true JPS6448023U (US08087162-20120103-C00010.png) 1989-03-24

Family

ID=31413313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14505787U Pending JPS6448023U (US08087162-20120103-C00010.png) 1987-09-21 1987-09-21

Country Status (1)

Country Link
JP (1) JPS6448023U (US08087162-20120103-C00010.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63257219A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 縦型処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63257219A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 縦型処理装置

Similar Documents

Publication Publication Date Title
JPS6448023U (US08087162-20120103-C00010.png)
JPS63121431U (US08087162-20120103-C00010.png)
JPH0425234U (US08087162-20120103-C00010.png)
JPH0160533U (US08087162-20120103-C00010.png)
JPS63126730U (US08087162-20120103-C00010.png)
JPH0313732U (US08087162-20120103-C00010.png)
JPH0338357U (US08087162-20120103-C00010.png)
JPS6334156U (US08087162-20120103-C00010.png)
JPS63108088U (US08087162-20120103-C00010.png)
JPS63149090U (US08087162-20120103-C00010.png)
JPS63121235U (US08087162-20120103-C00010.png)
JPS6361646U (US08087162-20120103-C00010.png)
JPH01173156U (US08087162-20120103-C00010.png)
JPS63107623U (US08087162-20120103-C00010.png)
JPH0192791U (US08087162-20120103-C00010.png)
JPS6451198U (US08087162-20120103-C00010.png)
JPS6451657U (US08087162-20120103-C00010.png)
JPS62199648U (US08087162-20120103-C00010.png)
JPS6437034U (US08087162-20120103-C00010.png)
JPS6360842U (US08087162-20120103-C00010.png)
JPH01153859U (US08087162-20120103-C00010.png)
JPS6360467U (US08087162-20120103-C00010.png)
JPS6265382U (US08087162-20120103-C00010.png)
JPS6184383U (US08087162-20120103-C00010.png)
JPS6280151U (US08087162-20120103-C00010.png)