JPS6447904A - Method for measuring gap between mask-wafer - Google Patents

Method for measuring gap between mask-wafer

Info

Publication number
JPS6447904A
JPS6447904A JP62204601A JP20460187A JPS6447904A JP S6447904 A JPS6447904 A JP S6447904A JP 62204601 A JP62204601 A JP 62204601A JP 20460187 A JP20460187 A JP 20460187A JP S6447904 A JPS6447904 A JP S6447904A
Authority
JP
Japan
Prior art keywords
mask
light
interference fringes
reflection
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62204601A
Other languages
Japanese (ja)
Inventor
Masao Yamada
Shigeru Maruyama
Hironobu Kitajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62204601A priority Critical patent/JPS6447904A/en
Publication of JPS6447904A publication Critical patent/JPS6447904A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To remove the adverse effect of the reflection from the upper surface of a mask and to improve reliability in detecting a periodic length, by matching an incident angle at the upper surface of the mask with a Brewster angle, making the incident light to be the polarized light of a TM wave, and forming interference fringes. CONSTITUTION:A polarizing element 10 is provided in the light path of laser light 3. The incident light is made to be polarized light 3a of a TM wave. An incident angle at an upper surface 2b of a mask is matched with a Brewster angle thetai. The reflection from the upper surface 2b of the mask becomes zero. Therefore, the reflected lights are only the reflected light 4a from an upper surface 1a of a wafer and reflected light 5a from a lower surface 2a of the mask. Interference fringes 7a are formed at a light receiving plane 6. The interference fringes are not associated with the reflection from the upper surface 2b of the mask. The interference fringes are formed with the interference of two luminous fluxes based on only the reflected lights 4a and 5a. A beat phenomenon is removed. A desired periodic length X can be detected with high reliability.
JP62204601A 1987-08-18 1987-08-18 Method for measuring gap between mask-wafer Pending JPS6447904A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62204601A JPS6447904A (en) 1987-08-18 1987-08-18 Method for measuring gap between mask-wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62204601A JPS6447904A (en) 1987-08-18 1987-08-18 Method for measuring gap between mask-wafer

Publications (1)

Publication Number Publication Date
JPS6447904A true JPS6447904A (en) 1989-02-22

Family

ID=16493160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62204601A Pending JPS6447904A (en) 1987-08-18 1987-08-18 Method for measuring gap between mask-wafer

Country Status (1)

Country Link
JP (1) JPS6447904A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101218542B1 (en) * 2010-11-16 2013-01-21 한양대학교 에리카산학협력단 Precision control stage
US8413625B2 (en) 2010-09-28 2013-04-09 Fiat Powertrain Technologies S.P.A. Transmission device between two camshafts of an internal combustion engine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8413625B2 (en) 2010-09-28 2013-04-09 Fiat Powertrain Technologies S.P.A. Transmission device between two camshafts of an internal combustion engine
KR101218542B1 (en) * 2010-11-16 2013-01-21 한양대학교 에리카산학협력단 Precision control stage

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