JPS6445633U - - Google Patents

Info

Publication number

JPS6445633U

JPS6445633U JP14025787U JP14025787U JPS6445633U JP S6445633 U JPS6445633 U JP S6445633U JP 14025787 U JP14025787 U JP 14025787U JP 14025787 U JP14025787 U JP 14025787U JP S6445633 U JPS6445633 U JP S6445633U

Authority

JP

Japan

Prior art keywords

substrate

conveyance

pair

substrate transfer

dust removal

Prior art date

1987-09-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 12
• 238000005096 rolling process Methods 0.000 claims description 3
• 239000000428 dust Substances 0.000 claims 3
• 238000004804 winding Methods 0.000 claims 3
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)