JPS6444652U - - Google Patents

Info

Publication number

JPS6444652U

JPS6444652U JP13789387U JP13789387U JPS6444652U JP S6444652 U JPS6444652 U JP S6444652U JP 13789387 U JP13789387 U JP 13789387U JP 13789387 U JP13789387 U JP 13789387U JP S6444652 U JPS6444652 U JP S6444652U

Authority

JP

Japan

Prior art keywords

active layer

semiconductor active

fet

metal

transmission line

Prior art date

1987-09-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
• 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
• 230000005540 biological transmission Effects 0.000 claims description 4
• 239000003990 capacitor Substances 0.000 claims description 3
• 229910052751 metal Inorganic materials 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 238000000034 method Methods 0.000 description 1

Cited By (1)