JPS6443306A - Membrane separation type water treatment apparatus - Google Patents

Membrane separation type water treatment apparatus

Info

Publication number
JPS6443306A
JPS6443306A JP19902287A JP19902287A JPS6443306A JP S6443306 A JPS6443306 A JP S6443306A JP 19902287 A JP19902287 A JP 19902287A JP 19902287 A JP19902287 A JP 19902287A JP S6443306 A JPS6443306 A JP S6443306A
Authority
JP
Japan
Prior art keywords
ultrafiltration membrane
valve
aeration tank
washing liquid
water treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19902287A
Inventor
Masao Kaneko
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP19902287A priority Critical patent/JPS6443306A/en
Publication of JPS6443306A publication Critical patent/JPS6443306A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/16Use of chemical agents
    • B01D2321/164Use of bases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/18Use of gases
    • B01D2321/185Aeration

Abstract

PURPOSE:To wash efficiently soil attached to an ultrafiltration membrane and ensure specified treated water at all times, by washing, using washing liquid containing tetramethylammonium hydroxide. CONSTITUTION:By means of a membrane separation type water treatment apparatus including an aeration tank 1 and an ultrafiltration membrane 2 which separates activated sludge in the aeration tank 1, waste water of developing solution of choline system or tetramethylammonium hydroxide (TMAH) system from a semiconductor manufacturing factory is treated. The discharged water from the aeration tank 1 is sent to the ultrafiltration membrane 2 by a pump 3, while the concentrated liquid is returned to the aeration tank 1 through a return line 4. When the ultrafiltration membrane 2 is washed, the pump 3 is stopped, a valve 5 closed, and a valve 9 opened to operate a pump 10 so that washing liquid 12 in a washing liquid reservoir 11 containing choline or TMAH is fed to the ultrafiltration membrane 2. As a result of this washing, flow quantity of permeation is restored. After that, the valve 9 is closed and a valve 13 opened to discharge the remaining washing liquid in the ultrafiltration membrane 2 to the outside, thereby water treatment being started again.
JP19902287A 1987-08-11 1987-08-11 Membrane separation type water treatment apparatus Pending JPS6443306A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19902287A JPS6443306A (en) 1987-08-11 1987-08-11 Membrane separation type water treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19902287A JPS6443306A (en) 1987-08-11 1987-08-11 Membrane separation type water treatment apparatus

Publications (1)

Publication Number Publication Date
JPS6443306A true JPS6443306A (en) 1989-02-15

Family

ID=16400819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19902287A Pending JPS6443306A (en) 1987-08-11 1987-08-11 Membrane separation type water treatment apparatus

Country Status (1)

Country Link
JP (1) JPS6443306A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04363193A (en) * 1991-03-18 1992-12-16 Fujita Corp Purification treatment of waste water
US5423988A (en) * 1992-10-29 1995-06-13 Sharp Kabushiki Kaisha Method and apparatus for treating developer-containing waste water at multiple biological treatment stages
US5599443A (en) * 1993-11-08 1997-02-04 Sharp Kabushiki Kaisha Apparatus for waste water treatment using charcoal biologically activated
US5702604A (en) * 1995-09-06 1997-12-30 Sharp Kabushiki Kaisha Apparatus and method for waste water treatment utilizing granular sludge
CN100417721C (en) * 2005-07-22 2008-09-10 因必欧奈特公司 Novel strain capable of decomposing tetramethyl ammonium hydroxide and method for treating waste water using the strain

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04363193A (en) * 1991-03-18 1992-12-16 Fujita Corp Purification treatment of waste water
US5423988A (en) * 1992-10-29 1995-06-13 Sharp Kabushiki Kaisha Method and apparatus for treating developer-containing waste water at multiple biological treatment stages
US5599443A (en) * 1993-11-08 1997-02-04 Sharp Kabushiki Kaisha Apparatus for waste water treatment using charcoal biologically activated
US5702604A (en) * 1995-09-06 1997-12-30 Sharp Kabushiki Kaisha Apparatus and method for waste water treatment utilizing granular sludge
CN100417721C (en) * 2005-07-22 2008-09-10 因必欧奈特公司 Novel strain capable of decomposing tetramethyl ammonium hydroxide and method for treating waste water using the strain

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