JPS6437844A - Transfer tool for semiconductor wafer - Google Patents
Transfer tool for semiconductor waferInfo
- Publication number
- JPS6437844A JPS6437844A JP62194964A JP19496487A JPS6437844A JP S6437844 A JPS6437844 A JP S6437844A JP 62194964 A JP62194964 A JP 62194964A JP 19496487 A JP19496487 A JP 19496487A JP S6437844 A JPS6437844 A JP S6437844A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- semiconductor wafer
- box body
- transfer tool
- shifted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To prevent the rolling of a semiconductor wafer at a time when the wafer is shifted, and to obviate the adhesion of dust in a box body onto the surface of the wafer and the change of the direction of an orientation flat by bringing the depth of the box body, on a side face of which an alignment member is fixed, to a specific value. CONSTITUTION:The depth of a box body 1 for a porter, to which a hand grip 2 is mounted and on a side face of which a zigzag alignment tool 3 is fixed, is brought to the value of 1.0-1.5 times as large as the radius of a semiconductor wafer. Consequently, the rolling of the wafer at a time when the semiconductor wafer is shifted is prevented. Accordingly, adhesion onto the wafer of dust in the box body and the change of the direction of an orientation flat are obviated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62194964A JPS6437844A (en) | 1987-08-03 | 1987-08-03 | Transfer tool for semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62194964A JPS6437844A (en) | 1987-08-03 | 1987-08-03 | Transfer tool for semiconductor wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437844A true JPS6437844A (en) | 1989-02-08 |
Family
ID=16333261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62194964A Pending JPS6437844A (en) | 1987-08-03 | 1987-08-03 | Transfer tool for semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437844A (en) |
-
1987
- 1987-08-03 JP JP62194964A patent/JPS6437844A/en active Pending
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