JPS6437032U - - Google Patents

Info

Publication number

JPS6437032U

JPS6437032U JP13361987U JP13361987U JPS6437032U JP S6437032 U JPS6437032 U JP S6437032U JP 13361987 U JP13361987 U JP 13361987U JP 13361987 U JP13361987 U JP 13361987U JP S6437032 U JPS6437032 U JP S6437032U

Authority

JP

Japan

Prior art keywords

core tube

furnace core

tube

heat

covered

Prior art date

1987-08-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 239000011521 glass Substances 0.000 claims description 2
• 239000002184 metal Substances 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000001816 cooling Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 125000006850 spacer group Chemical group 0.000 description 1