JPS6437031U - - Google Patents

Info

Publication number

JPS6437031U

JPS6437031U JP13361887U JP13361887U JPS6437031U JP S6437031 U JPS6437031 U JP S6437031U JP 13361887 U JP13361887 U JP 13361887U JP 13361887 U JP13361887 U JP 13361887U JP S6437031 U JPS6437031 U JP S6437031U

Authority

JP

Japan

Prior art keywords

heat ray

provided outside

heat

core tube

furnace core

Prior art date

1987-08-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 238000001816 cooling Methods 0.000 claims description 2
• 239000011521 glass Substances 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4