JPS6436955U - - Google Patents

Info

Publication number
JPS6436955U
JPS6436955U JP13200787U JP13200787U JPS6436955U JP S6436955 U JPS6436955 U JP S6436955U JP 13200787 U JP13200787 U JP 13200787U JP 13200787 U JP13200787 U JP 13200787U JP S6436955 U JPS6436955 U JP S6436955U
Authority
JP
Japan
Prior art keywords
lid
ring
source device
ion source
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13200787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13200787U priority Critical patent/JPS6436955U/ja
Publication of JPS6436955U publication Critical patent/JPS6436955U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP13200787U 1987-08-29 1987-08-29 Pending JPS6436955U (US07968547-20110628-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13200787U JPS6436955U (US07968547-20110628-C00004.png) 1987-08-29 1987-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13200787U JPS6436955U (US07968547-20110628-C00004.png) 1987-08-29 1987-08-29

Publications (1)

Publication Number Publication Date
JPS6436955U true JPS6436955U (US07968547-20110628-C00004.png) 1989-03-06

Family

ID=31388584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13200787U Pending JPS6436955U (US07968547-20110628-C00004.png) 1987-08-29 1987-08-29

Country Status (1)

Country Link
JP (1) JPS6436955U (US07968547-20110628-C00004.png)

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