JPS6435228U - - Google Patents

Info

Publication number
JPS6435228U
JPS6435228U JP13027187U JP13027187U JPS6435228U JP S6435228 U JPS6435228 U JP S6435228U JP 13027187 U JP13027187 U JP 13027187U JP 13027187 U JP13027187 U JP 13027187U JP S6435228 U JPS6435228 U JP S6435228U
Authority
JP
Japan
Prior art keywords
bifurcated
radial direction
outer end
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13027187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13027187U priority Critical patent/JPS6435228U/ja
Publication of JPS6435228U publication Critical patent/JPS6435228U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Braking Arrangements (AREA)
JP13027187U 1987-08-27 1987-08-27 Pending JPS6435228U (US07494231-20090224-C00006.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13027187U JPS6435228U (US07494231-20090224-C00006.png) 1987-08-27 1987-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13027187U JPS6435228U (US07494231-20090224-C00006.png) 1987-08-27 1987-08-27

Publications (1)

Publication Number Publication Date
JPS6435228U true JPS6435228U (US07494231-20090224-C00006.png) 1989-03-03

Family

ID=31385286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13027187U Pending JPS6435228U (US07494231-20090224-C00006.png) 1987-08-27 1987-08-27

Country Status (1)

Country Link
JP (1) JPS6435228U (US07494231-20090224-C00006.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7604401B2 (en) 2004-07-01 2009-10-20 Ul Vac, Inc. Substrate temperature measurement apparatus and processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7604401B2 (en) 2004-07-01 2009-10-20 Ul Vac, Inc. Substrate temperature measurement apparatus and processing apparatus

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