JPS6434154U - - Google Patents

Info

Publication number
JPS6434154U
JPS6434154U JP1987129946U JP12994687U JPS6434154U JP S6434154 U JPS6434154 U JP S6434154U JP 1987129946 U JP1987129946 U JP 1987129946U JP 12994687 U JP12994687 U JP 12994687U JP S6434154 U JPS6434154 U JP S6434154U
Authority
JP
Japan
Prior art keywords
polishing
polishing cloth
carrier
brush
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987129946U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987129946U priority Critical patent/JPS6434154U/ja
Publication of JPS6434154U publication Critical patent/JPS6434154U/ja
Pending legal-status Critical Current

Links

JP1987129946U 1987-08-26 1987-08-26 Pending JPS6434154U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987129946U JPS6434154U (US06815460-20041109-C00097.png) 1987-08-26 1987-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987129946U JPS6434154U (US06815460-20041109-C00097.png) 1987-08-26 1987-08-26

Publications (1)

Publication Number Publication Date
JPS6434154U true JPS6434154U (US06815460-20041109-C00097.png) 1989-03-02

Family

ID=31384679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987129946U Pending JPS6434154U (US06815460-20041109-C00097.png) 1987-08-26 1987-08-26

Country Status (1)

Country Link
JP (1) JPS6434154U (US06815460-20041109-C00097.png)

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