JPS6430842U - - Google Patents

Info

Publication number
JPS6430842U
JPS6430842U JP12570187U JP12570187U JPS6430842U JP S6430842 U JPS6430842 U JP S6430842U JP 12570187 U JP12570187 U JP 12570187U JP 12570187 U JP12570187 U JP 12570187U JP S6430842 U JPS6430842 U JP S6430842U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
susceptor
tip
rod
shaped body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12570187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12570187U priority Critical patent/JPS6430842U/ja
Publication of JPS6430842U publication Critical patent/JPS6430842U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP12570187U 1987-08-20 1987-08-20 Pending JPS6430842U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12570187U JPS6430842U (US07943777-20110517-C00090.png) 1987-08-20 1987-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12570187U JPS6430842U (US07943777-20110517-C00090.png) 1987-08-20 1987-08-20

Publications (1)

Publication Number Publication Date
JPS6430842U true JPS6430842U (US07943777-20110517-C00090.png) 1989-02-27

Family

ID=31376537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12570187U Pending JPS6430842U (US07943777-20110517-C00090.png) 1987-08-20 1987-08-20

Country Status (1)

Country Link
JP (1) JPS6430842U (US07943777-20110517-C00090.png)

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