JPS6430222A - Method and device for coating - Google Patents
Method and device for coatingInfo
- Publication number
- JPS6430222A JPS6430222A JP18619287A JP18619287A JPS6430222A JP S6430222 A JPS6430222 A JP S6430222A JP 18619287 A JP18619287 A JP 18619287A JP 18619287 A JP18619287 A JP 18619287A JP S6430222 A JPS6430222 A JP S6430222A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- peripheral part
- sec
- substrate
- water soluble
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent dust raised by scattering resist due to DUV (far ultraviolet ray) irradiation from accumulating by a method wherein, after spin-coating a substrate with a resist or a sensing resin material, only the peripheral part of substrate is spincoated with a water soluble polymer. CONSTITUTION:A substrate 1 is spin-coated with resist 2 in specified thickness. Next, only the peripheral part of resist 2 is spincoated with water soluble polymer 5. A coating device is turned, after dripping the resist 2, at 1000 RPM for 10 sec and then at 4000 RPM for 5 sec and additional 15 sec. Thus, the peripheral part of resist 2 is covered with the polyvinyl alcohol film 5 covering a bump of the resist 2. Later, the breakdown of peripheral part of resist 2 due to DUV irradiation can be completely avoided by the action of the covering water soluble polymer 5.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18619287A JPS6430222A (en) | 1987-07-24 | 1987-07-24 | Method and device for coating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18619287A JPS6430222A (en) | 1987-07-24 | 1987-07-24 | Method and device for coating |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6430222A true JPS6430222A (en) | 1989-02-01 |
Family
ID=16183998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18619287A Pending JPS6430222A (en) | 1987-07-24 | 1987-07-24 | Method and device for coating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6430222A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8080364B2 (en) | 2003-05-09 | 2011-12-20 | Panasonic Corporation | Pattern formation method |
-
1987
- 1987-07-24 JP JP18619287A patent/JPS6430222A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8080364B2 (en) | 2003-05-09 | 2011-12-20 | Panasonic Corporation | Pattern formation method |
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