JPS6429673U - - Google Patents

Info

Publication number

JPS6429673U

JPS6429673U JP12268387U JP12268387U JPS6429673U JP S6429673 U JPS6429673 U JP S6429673U JP 12268387 U JP12268387 U JP 12268387U JP 12268387 U JP12268387 U JP 12268387U JP S6429673 U JPS6429673 U JP S6429673U

Authority

JP

Japan

Prior art keywords

structures

dimensional

dimensional map

various

components

Prior art date

1987-08-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
• 239000003990 capacitor Substances 0.000 description 2
• 229910052799 carbon Inorganic materials 0.000 description 2
• 239000000126 substance Substances 0.000 description 2
• 239000000758 substrate Substances 0.000 description 1