JPS6426145A - Ruggedness image pickup device for surface of sample by ultrasonic wave - Google Patents
Ruggedness image pickup device for surface of sample by ultrasonic waveInfo
- Publication number
- JPS6426145A JPS6426145A JP63148146A JP14814688A JPS6426145A JP S6426145 A JPS6426145 A JP S6426145A JP 63148146 A JP63148146 A JP 63148146A JP 14814688 A JP14814688 A JP 14814688A JP S6426145 A JPS6426145 A JP S6426145A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- sample
- distance
- maximum value
- ultrasonic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
PURPOSE:To automatically align a focus of a lens with the surface of a sample by changing a distance between the lens and the sample, detecting two or more maximum values, and determining a distance for giving the maximum value obtained by comparing the maximum values. CONSTITUTION:To a lens 200, power is supplied from an RF oscillator 180, a slender ultrasonic beam is projected from the lens, and a reflected ultrasonic wave by a sample 220 is collected again by the lens, and converted to a video signal through an RF receiver 290 and a detector 300. Subsequently, a pulse is sent to a power source 240 from a pulse oscillator 250, and while bringing the lens 200 close to the sample 220, a first maximum value of a reflecting signal and a distance between the lens and the sample at that time re detected and stored. By bringing the lens close further, the next maximum value is stored. This work is repeated, and stopped when an i-th maximum value has become larger than an i-1-th maximum value. In the end, the lens 200 is kept away from the sample 220 so that the distance between the lens and the sample becomes the i-1-th distance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63148146A JPS6426145A (en) | 1988-06-17 | 1988-06-17 | Ruggedness image pickup device for surface of sample by ultrasonic wave |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63148146A JPS6426145A (en) | 1988-06-17 | 1988-06-17 | Ruggedness image pickup device for surface of sample by ultrasonic wave |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6426145A true JPS6426145A (en) | 1989-01-27 |
Family
ID=15446294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63148146A Pending JPS6426145A (en) | 1988-06-17 | 1988-06-17 | Ruggedness image pickup device for surface of sample by ultrasonic wave |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6426145A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013015407A (en) * | 2011-07-04 | 2013-01-24 | Fujitsu Ltd | Examination apparatus and examination method |
-
1988
- 1988-06-17 JP JP63148146A patent/JPS6426145A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013015407A (en) * | 2011-07-04 | 2013-01-24 | Fujitsu Ltd | Examination apparatus and examination method |
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