JPS6426145A - Ruggedness image pickup device for surface of sample by ultrasonic wave - Google Patents

Ruggedness image pickup device for surface of sample by ultrasonic wave

Info

Publication number
JPS6426145A
JPS6426145A JP63148146A JP14814688A JPS6426145A JP S6426145 A JPS6426145 A JP S6426145A JP 63148146 A JP63148146 A JP 63148146A JP 14814688 A JP14814688 A JP 14814688A JP S6426145 A JPS6426145 A JP S6426145A
Authority
JP
Japan
Prior art keywords
lens
sample
distance
maximum value
ultrasonic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63148146A
Other languages
Japanese (ja)
Inventor
Hiroshi Kanda
Kiyoshi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP63148146A priority Critical patent/JPS6426145A/en
Publication of JPS6426145A publication Critical patent/JPS6426145A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To automatically align a focus of a lens with the surface of a sample by changing a distance between the lens and the sample, detecting two or more maximum values, and determining a distance for giving the maximum value obtained by comparing the maximum values. CONSTITUTION:To a lens 200, power is supplied from an RF oscillator 180, a slender ultrasonic beam is projected from the lens, and a reflected ultrasonic wave by a sample 220 is collected again by the lens, and converted to a video signal through an RF receiver 290 and a detector 300. Subsequently, a pulse is sent to a power source 240 from a pulse oscillator 250, and while bringing the lens 200 close to the sample 220, a first maximum value of a reflecting signal and a distance between the lens and the sample at that time re detected and stored. By bringing the lens close further, the next maximum value is stored. This work is repeated, and stopped when an i-th maximum value has become larger than an i-1-th maximum value. In the end, the lens 200 is kept away from the sample 220 so that the distance between the lens and the sample becomes the i-1-th distance.
JP63148146A 1988-06-17 1988-06-17 Ruggedness image pickup device for surface of sample by ultrasonic wave Pending JPS6426145A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63148146A JPS6426145A (en) 1988-06-17 1988-06-17 Ruggedness image pickup device for surface of sample by ultrasonic wave

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63148146A JPS6426145A (en) 1988-06-17 1988-06-17 Ruggedness image pickup device for surface of sample by ultrasonic wave

Publications (1)

Publication Number Publication Date
JPS6426145A true JPS6426145A (en) 1989-01-27

Family

ID=15446294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63148146A Pending JPS6426145A (en) 1988-06-17 1988-06-17 Ruggedness image pickup device for surface of sample by ultrasonic wave

Country Status (1)

Country Link
JP (1) JPS6426145A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013015407A (en) * 2011-07-04 2013-01-24 Fujitsu Ltd Examination apparatus and examination method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013015407A (en) * 2011-07-04 2013-01-24 Fujitsu Ltd Examination apparatus and examination method

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