JPS6425389U - - Google Patents

Info

Publication number

JPS6425389U

JPS6425389U JP11673987U JP11673987U JPS6425389U JP S6425389 U JPS6425389 U JP S6425389U JP 11673987 U JP11673987 U JP 11673987U JP 11673987 U JP11673987 U JP 11673987U JP S6425389 U JPS6425389 U JP S6425389U

Authority

JP

Japan

Prior art keywords

flow rate

nozzle group

cleaning

cleaning fluid

rate sensor

Prior art date

1987-07-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 7
• 238000001514 detection method Methods 0.000 claims description 2
• 239000012530 fluid Substances 0.000 claims 3
• 230000005856 abnormality Effects 0.000 claims 1
• 238000005507 spraying Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000007788 liquid Substances 0.000 description 1
• 230000001105 regulatory effect Effects 0.000 description 1

Cited By (2)