JPS6424826U - - Google Patents

Info

Publication number
JPS6424826U
JPS6424826U JP11983387U JP11983387U JPS6424826U JP S6424826 U JPS6424826 U JP S6424826U JP 11983387 U JP11983387 U JP 11983387U JP 11983387 U JP11983387 U JP 11983387U JP S6424826 U JPS6424826 U JP S6424826U
Authority
JP
Japan
Prior art keywords
chuck mechanism
rotating shaft
semiconductor wafer
cover
cleaning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11983387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11983387U priority Critical patent/JPS6424826U/ja
Publication of JPS6424826U publication Critical patent/JPS6424826U/ja
Pending legal-status Critical Current

Links

JP11983387U 1987-08-06 1987-08-06 Pending JPS6424826U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11983387U JPS6424826U (US20030204162A1-20031030-M00001.png) 1987-08-06 1987-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11983387U JPS6424826U (US20030204162A1-20031030-M00001.png) 1987-08-06 1987-08-06

Publications (1)

Publication Number Publication Date
JPS6424826U true JPS6424826U (US20030204162A1-20031030-M00001.png) 1989-02-10

Family

ID=31365407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11983387U Pending JPS6424826U (US20030204162A1-20031030-M00001.png) 1987-08-06 1987-08-06

Country Status (1)

Country Link
JP (1) JPS6424826U (US20030204162A1-20031030-M00001.png)

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