JPS6422026U - - Google Patents

Info

Publication number
JPS6422026U
JPS6422026U JP11800987U JP11800987U JPS6422026U JP S6422026 U JPS6422026 U JP S6422026U JP 11800987 U JP11800987 U JP 11800987U JP 11800987 U JP11800987 U JP 11800987U JP S6422026 U JPS6422026 U JP S6422026U
Authority
JP
Japan
Prior art keywords
fork
wafer
furnace
carrying
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11800987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11800987U priority Critical patent/JPS6422026U/ja
Publication of JPS6422026U publication Critical patent/JPS6422026U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP11800987U 1987-07-31 1987-07-31 Pending JPS6422026U (US20020051482A1-20020502-M00057.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11800987U JPS6422026U (US20020051482A1-20020502-M00057.png) 1987-07-31 1987-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11800987U JPS6422026U (US20020051482A1-20020502-M00057.png) 1987-07-31 1987-07-31

Publications (1)

Publication Number Publication Date
JPS6422026U true JPS6422026U (US20020051482A1-20020502-M00057.png) 1989-02-03

Family

ID=31361984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11800987U Pending JPS6422026U (US20020051482A1-20020502-M00057.png) 1987-07-31 1987-07-31

Country Status (1)

Country Link
JP (1) JPS6422026U (US20020051482A1-20020502-M00057.png)

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