JPS6420623A - Flattening method - Google Patents
Flattening methodInfo
- Publication number
- JPS6420623A JPS6420623A JP17591687A JP17591687A JPS6420623A JP S6420623 A JPS6420623 A JP S6420623A JP 17591687 A JP17591687 A JP 17591687A JP 17591687 A JP17591687 A JP 17591687A JP S6420623 A JPS6420623 A JP S6420623A
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- etching
- exposed
- covered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17591687A JPS6420623A (en) | 1987-07-16 | 1987-07-16 | Flattening method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17591687A JPS6420623A (en) | 1987-07-16 | 1987-07-16 | Flattening method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6420623A true JPS6420623A (en) | 1989-01-24 |
Family
ID=16004491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17591687A Pending JPS6420623A (en) | 1987-07-16 | 1987-07-16 | Flattening method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420623A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03288431A (ja) * | 1990-04-05 | 1991-12-18 | Nec Corp | エッチバック平坦化方法 |
JP2020017555A (ja) * | 2018-07-23 | 2020-01-30 | 株式会社アルバック | ドライエッチング方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5664436A (en) * | 1979-10-30 | 1981-06-01 | Fujitsu Ltd | Manufacturf of semiconductor device |
JPS61107743A (ja) * | 1984-10-30 | 1986-05-26 | Nec Corp | 半導体装置の製造方法 |
JPS6273723A (ja) * | 1985-09-27 | 1987-04-04 | Sumitomo Electric Ind Ltd | エツチバツク法による平坦化工程終点検出方法 |
-
1987
- 1987-07-16 JP JP17591687A patent/JPS6420623A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5664436A (en) * | 1979-10-30 | 1981-06-01 | Fujitsu Ltd | Manufacturf of semiconductor device |
JPS61107743A (ja) * | 1984-10-30 | 1986-05-26 | Nec Corp | 半導体装置の製造方法 |
JPS6273723A (ja) * | 1985-09-27 | 1987-04-04 | Sumitomo Electric Ind Ltd | エツチバツク法による平坦化工程終点検出方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03288431A (ja) * | 1990-04-05 | 1991-12-18 | Nec Corp | エッチバック平坦化方法 |
JP2020017555A (ja) * | 2018-07-23 | 2020-01-30 | 株式会社アルバック | ドライエッチング方法 |
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