JPS6417370A - Surface analyzer - Google Patents

Surface analyzer

Info

Publication number
JPS6417370A
JPS6417370A JP62172227A JP17222787A JPS6417370A JP S6417370 A JPS6417370 A JP S6417370A JP 62172227 A JP62172227 A JP 62172227A JP 17222787 A JP17222787 A JP 17222787A JP S6417370 A JPS6417370 A JP S6417370A
Authority
JP
Japan
Prior art keywords
position detector
detection efficiency
proton
microchannel
collimator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62172227A
Other languages
Japanese (ja)
Inventor
Masahiko Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62172227A priority Critical patent/JPS6417370A/en
Publication of JPS6417370A publication Critical patent/JPS6417370A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To make detection efficiency inclusive of a microchannel measurable in the inner part of an analyzer, by moving a position detector parallelly, and applying it to a beam. CONSTITUTION:A collimator 6 is installed in a proton beam outgoing-incoming position of a magnet 2, making proton beam width variable, and a position detector 5 is moved to an A position in the rear of the collimator 6 and a B position for measuring the energy emitted after scattered proton beams have described the circular orbit by the magnet 2, respectively, by a mobile mechanism 9. And, a proton incident ion number is measured by be channeltron 7 installed in an ultra-high vacuum chamber 8, finding detection efficiency as a function for a position of the position detector 5. With this constitution, the detection efficiency inclusive of a microchannel of the position detector is easily measurable, so that accurate data are securable even in the quantitative standpoint.
JP62172227A 1987-07-10 1987-07-10 Surface analyzer Pending JPS6417370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62172227A JPS6417370A (en) 1987-07-10 1987-07-10 Surface analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62172227A JPS6417370A (en) 1987-07-10 1987-07-10 Surface analyzer

Publications (1)

Publication Number Publication Date
JPS6417370A true JPS6417370A (en) 1989-01-20

Family

ID=15937957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62172227A Pending JPS6417370A (en) 1987-07-10 1987-07-10 Surface analyzer

Country Status (1)

Country Link
JP (1) JPS6417370A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031845A (en) * 1989-05-31 1991-01-08 Shimadzu Corp Instrument for x-ray image display

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031845A (en) * 1989-05-31 1991-01-08 Shimadzu Corp Instrument for x-ray image display

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