JPS6417370A - Surface analyzer - Google Patents
Surface analyzerInfo
- Publication number
- JPS6417370A JPS6417370A JP62172227A JP17222787A JPS6417370A JP S6417370 A JPS6417370 A JP S6417370A JP 62172227 A JP62172227 A JP 62172227A JP 17222787 A JP17222787 A JP 17222787A JP S6417370 A JPS6417370 A JP S6417370A
- Authority
- JP
- Japan
- Prior art keywords
- position detector
- detection efficiency
- proton
- microchannel
- collimator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 abstract 3
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To make detection efficiency inclusive of a microchannel measurable in the inner part of an analyzer, by moving a position detector parallelly, and applying it to a beam. CONSTITUTION:A collimator 6 is installed in a proton beam outgoing-incoming position of a magnet 2, making proton beam width variable, and a position detector 5 is moved to an A position in the rear of the collimator 6 and a B position for measuring the energy emitted after scattered proton beams have described the circular orbit by the magnet 2, respectively, by a mobile mechanism 9. And, a proton incident ion number is measured by be channeltron 7 installed in an ultra-high vacuum chamber 8, finding detection efficiency as a function for a position of the position detector 5. With this constitution, the detection efficiency inclusive of a microchannel of the position detector is easily measurable, so that accurate data are securable even in the quantitative standpoint.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62172227A JPS6417370A (en) | 1987-07-10 | 1987-07-10 | Surface analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62172227A JPS6417370A (en) | 1987-07-10 | 1987-07-10 | Surface analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6417370A true JPS6417370A (en) | 1989-01-20 |
Family
ID=15937957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62172227A Pending JPS6417370A (en) | 1987-07-10 | 1987-07-10 | Surface analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6417370A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH031845A (en) * | 1989-05-31 | 1991-01-08 | Shimadzu Corp | Instrument for x-ray image display |
-
1987
- 1987-07-10 JP JP62172227A patent/JPS6417370A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH031845A (en) * | 1989-05-31 | 1991-01-08 | Shimadzu Corp | Instrument for x-ray image display |
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