JPS641721B2 - - Google Patents

Info

Publication number
JPS641721B2
JPS641721B2 JP22073182A JP22073182A JPS641721B2 JP S641721 B2 JPS641721 B2 JP S641721B2 JP 22073182 A JP22073182 A JP 22073182A JP 22073182 A JP22073182 A JP 22073182A JP S641721 B2 JPS641721 B2 JP S641721B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22073182A
Other versions
JPS59109807A (en
Inventor
Akihiro Ootsuki
Nobuyuki Takahashi
Shoichi Nagamura
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP22073182A priority Critical patent/JPS641721B2/ja
Publication of JPS59109807A publication Critical patent/JPS59109807A/en
Publication of JPS641721B2 publication Critical patent/JPS641721B2/ja
Application status is Expired legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness, e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness, e.g. of sheet material of coating
JP22073182A 1982-12-16 1982-12-16 Expired JPS641721B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22073182A JPS641721B2 (en) 1982-12-16 1982-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22073182A JPS641721B2 (en) 1982-12-16 1982-12-16

Publications (2)

Publication Number Publication Date
JPS59109807A JPS59109807A (en) 1984-06-25
JPS641721B2 true JPS641721B2 (en) 1989-01-12

Family

ID=16755639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22073182A Expired JPS641721B2 (en) 1982-12-16 1982-12-16

Country Status (1)

Country Link
JP (1) JPS641721B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL107549A (en) 1993-11-09 1996-01-31 Nova Measuring Instr Ltd Device for measuring the thickness of thin films
US5764365A (en) 1993-11-09 1998-06-09 Nova Measuring Instruments, Ltd. Two-dimensional beam deflector

Also Published As

Publication number Publication date
JPS59109807A (en) 1984-06-25

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