JPS6416392A - Floating gripping shaft mechanism - Google Patents

Floating gripping shaft mechanism

Info

Publication number
JPS6416392A
JPS6416392A JP62171460A JP17146087A JPS6416392A JP S6416392 A JPS6416392 A JP S6416392A JP 62171460 A JP62171460 A JP 62171460A JP 17146087 A JP17146087 A JP 17146087A JP S6416392 A JPS6416392 A JP S6416392A
Authority
JP
Japan
Prior art keywords
shaft
movable shaft
hollow body
external force
measuring part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62171460A
Other languages
Japanese (ja)
Other versions
JP2552142B2 (en
Inventor
Seiji Terajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP62171460A priority Critical patent/JP2552142B2/en
Publication of JPS6416392A publication Critical patent/JPS6416392A/en
Application granted granted Critical
Publication of JP2552142B2 publication Critical patent/JP2552142B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE: To directly feed a mold IC dislocated from a pocket of a pallet, to a measuring part by, composing a grip shaft of a thrust bearing and an elastic annular hollow body, and moving the grip shaft in X-, Y-, θ-directions on a horizontal plane by small external force. CONSTITUTION: One end of a movable shaft 8 is connected to a hollow shaft 3 through an elastic annular hollow body 4, and the movable shaft 8 is supported by a thrust bearing 6. The movable shaft 8 is in a center position in a normal state and is to be moved in an X-, Y-or θ-direction by external force, and the elastic annular hollow body 4 functions to adjust the balance of center restoring force and external force. A vacuum source is fitted to a vacuum end connection 2 from the outside, and a mold IC9 is vacuum-sucked through the hollow shaft 3, hollow body 4 and movable shaft 8. The IC9 is conveyed to a measuring part by a pallet and fed along the guide of the measuring part. At this time, if the position of the IC is dislocated from the guide part, the movable shaft 8 moves in the X-, Y, θ-directions to accurately feed the IC9.
JP62171460A 1987-07-09 1987-07-09 Gripping axis mechanism of transfer device and transfer method Expired - Lifetime JP2552142B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62171460A JP2552142B2 (en) 1987-07-09 1987-07-09 Gripping axis mechanism of transfer device and transfer method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62171460A JP2552142B2 (en) 1987-07-09 1987-07-09 Gripping axis mechanism of transfer device and transfer method

Publications (2)

Publication Number Publication Date
JPS6416392A true JPS6416392A (en) 1989-01-19
JP2552142B2 JP2552142B2 (en) 1996-11-06

Family

ID=15923518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62171460A Expired - Lifetime JP2552142B2 (en) 1987-07-09 1987-07-09 Gripping axis mechanism of transfer device and transfer method

Country Status (1)

Country Link
JP (1) JP2552142B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03238380A (en) * 1990-02-16 1991-10-24 Japan Radio Co Ltd Receiver for ultrasonic detection

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS609698A (en) * 1983-06-30 1985-01-18 三菱電機株式会社 Hand device for industrial robot

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS609698A (en) * 1983-06-30 1985-01-18 三菱電機株式会社 Hand device for industrial robot

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03238380A (en) * 1990-02-16 1991-10-24 Japan Radio Co Ltd Receiver for ultrasonic detection

Also Published As

Publication number Publication date
JP2552142B2 (en) 1996-11-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term