JPS6416392A - Floating gripping shaft mechanism - Google Patents
Floating gripping shaft mechanismInfo
- Publication number
- JPS6416392A JPS6416392A JP62171460A JP17146087A JPS6416392A JP S6416392 A JPS6416392 A JP S6416392A JP 62171460 A JP62171460 A JP 62171460A JP 17146087 A JP17146087 A JP 17146087A JP S6416392 A JPS6416392 A JP S6416392A
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- movable shaft
- hollow body
- external force
- measuring part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Manipulator (AREA)
Abstract
PURPOSE: To directly feed a mold IC dislocated from a pocket of a pallet, to a measuring part by, composing a grip shaft of a thrust bearing and an elastic annular hollow body, and moving the grip shaft in X-, Y-, θ-directions on a horizontal plane by small external force. CONSTITUTION: One end of a movable shaft 8 is connected to a hollow shaft 3 through an elastic annular hollow body 4, and the movable shaft 8 is supported by a thrust bearing 6. The movable shaft 8 is in a center position in a normal state and is to be moved in an X-, Y-or θ-direction by external force, and the elastic annular hollow body 4 functions to adjust the balance of center restoring force and external force. A vacuum source is fitted to a vacuum end connection 2 from the outside, and a mold IC9 is vacuum-sucked through the hollow shaft 3, hollow body 4 and movable shaft 8. The IC9 is conveyed to a measuring part by a pallet and fed along the guide of the measuring part. At this time, if the position of the IC is dislocated from the guide part, the movable shaft 8 moves in the X-, Y, θ-directions to accurately feed the IC9.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62171460A JP2552142B2 (en) | 1987-07-09 | 1987-07-09 | Gripping axis mechanism of transfer device and transfer method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62171460A JP2552142B2 (en) | 1987-07-09 | 1987-07-09 | Gripping axis mechanism of transfer device and transfer method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6416392A true JPS6416392A (en) | 1989-01-19 |
JP2552142B2 JP2552142B2 (en) | 1996-11-06 |
Family
ID=15923518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62171460A Expired - Lifetime JP2552142B2 (en) | 1987-07-09 | 1987-07-09 | Gripping axis mechanism of transfer device and transfer method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2552142B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03238380A (en) * | 1990-02-16 | 1991-10-24 | Japan Radio Co Ltd | Receiver for ultrasonic detection |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS609698A (en) * | 1983-06-30 | 1985-01-18 | 三菱電機株式会社 | Hand device for industrial robot |
-
1987
- 1987-07-09 JP JP62171460A patent/JP2552142B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS609698A (en) * | 1983-06-30 | 1985-01-18 | 三菱電機株式会社 | Hand device for industrial robot |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03238380A (en) * | 1990-02-16 | 1991-10-24 | Japan Radio Co Ltd | Receiver for ultrasonic detection |
Also Published As
Publication number | Publication date |
---|---|
JP2552142B2 (en) | 1996-11-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |