JPS6415966U - - Google Patents

Info

Publication number

JPS6415966U

JPS6415966U JP10715687U JP10715687U JPS6415966U JP S6415966 U JPS6415966 U JP S6415966U JP 10715687 U JP10715687 U JP 10715687U JP 10715687 U JP10715687 U JP 10715687U JP S6415966 U JPS6415966 U JP S6415966U

Authority

JP

Japan

Prior art keywords

flexible portion

semiconductor

semiconductor substrate

quantity sensor

polymer film

Prior art date

1987-07-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000000758 substrate Substances 0.000 claims description 3
• 229920000592 inorganic polymer Polymers 0.000 claims 1
• 229920000620 organic polymer Polymers 0.000 claims 1
• 230000001133 acceleration Effects 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 229920006254 polymer film Polymers 0.000 description 1