JPS6415236U - - Google Patents

Info

Publication number
JPS6415236U
JPS6415236U JP1987109333U JP10933387U JPS6415236U JP S6415236 U JPS6415236 U JP S6415236U JP 1987109333 U JP1987109333 U JP 1987109333U JP 10933387 U JP10933387 U JP 10933387U JP S6415236 U JPS6415236 U JP S6415236U
Authority
JP
Japan
Prior art keywords
light
shielding pattern
pattern member
reticle
embedded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987109333U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987109333U priority Critical patent/JPS6415236U/ja
Publication of JPS6415236U publication Critical patent/JPS6415236U/ja
Pending legal-status Critical Current

Links

JP1987109333U 1987-07-16 1987-07-16 Pending JPS6415236U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987109333U JPS6415236U (US20100268047A1-20101021-C00003.png) 1987-07-16 1987-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987109333U JPS6415236U (US20100268047A1-20101021-C00003.png) 1987-07-16 1987-07-16

Publications (1)

Publication Number Publication Date
JPS6415236U true JPS6415236U (US20100268047A1-20101021-C00003.png) 1989-01-25

Family

ID=31345481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987109333U Pending JPS6415236U (US20100268047A1-20101021-C00003.png) 1987-07-16 1987-07-16

Country Status (1)

Country Link
JP (1) JPS6415236U (US20100268047A1-20101021-C00003.png)

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