JPS6414923A - Wafer cleaning device - Google Patents
Wafer cleaning deviceInfo
- Publication number
- JPS6414923A JPS6414923A JP17159287A JP17159287A JPS6414923A JP S6414923 A JPS6414923 A JP S6414923A JP 17159287 A JP17159287 A JP 17159287A JP 17159287 A JP17159287 A JP 17159287A JP S6414923 A JPS6414923 A JP S6414923A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- exhausted
- wafer
- water
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17159287A JPS6414923A (en) | 1987-07-08 | 1987-07-08 | Wafer cleaning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17159287A JPS6414923A (en) | 1987-07-08 | 1987-07-08 | Wafer cleaning device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6414923A true JPS6414923A (en) | 1989-01-19 |
Family
ID=15926017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17159287A Pending JPS6414923A (en) | 1987-07-08 | 1987-07-08 | Wafer cleaning device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6414923A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0321847U (ja) * | 1989-07-14 | 1991-03-05 | ||
CN107855306A (zh) * | 2017-10-13 | 2018-03-30 | 杨田财 | 一种骨科用病例取材脱钙后冲水装置 |
-
1987
- 1987-07-08 JP JP17159287A patent/JPS6414923A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0321847U (ja) * | 1989-07-14 | 1991-03-05 | ||
CN107855306A (zh) * | 2017-10-13 | 2018-03-30 | 杨田财 | 一种骨科用病例取材脱钙后冲水装置 |
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