JPS6413728U - - Google Patents

Info

Publication number
JPS6413728U
JPS6413728U JP10963287U JP10963287U JPS6413728U JP S6413728 U JPS6413728 U JP S6413728U JP 10963287 U JP10963287 U JP 10963287U JP 10963287 U JP10963287 U JP 10963287U JP S6413728 U JPS6413728 U JP S6413728U
Authority
JP
Japan
Prior art keywords
side wall
chuck
center
suction tube
fluid discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10963287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10963287U priority Critical patent/JPS6413728U/ja
Publication of JPS6413728U publication Critical patent/JPS6413728U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP10963287U 1987-07-17 1987-07-17 Pending JPS6413728U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10963287U JPS6413728U (US20090163788A1-20090625-C00002.png) 1987-07-17 1987-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10963287U JPS6413728U (US20090163788A1-20090625-C00002.png) 1987-07-17 1987-07-17

Publications (1)

Publication Number Publication Date
JPS6413728U true JPS6413728U (US20090163788A1-20090625-C00002.png) 1989-01-24

Family

ID=31346053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10963287U Pending JPS6413728U (US20090163788A1-20090625-C00002.png) 1987-07-17 1987-07-17

Country Status (1)

Country Link
JP (1) JPS6413728U (US20090163788A1-20090625-C00002.png)

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