JPS6413133U - - Google Patents

Info

Publication number
JPS6413133U
JPS6413133U JP10795187U JP10795187U JPS6413133U JP S6413133 U JPS6413133 U JP S6413133U JP 10795187 U JP10795187 U JP 10795187U JP 10795187 U JP10795187 U JP 10795187U JP S6413133 U JPS6413133 U JP S6413133U
Authority
JP
Japan
Prior art keywords
valve
valve seat
air throttle
adsorption stage
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10795187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10795187U priority Critical patent/JPS6413133U/ja
Publication of JPS6413133U publication Critical patent/JPS6413133U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10795187U 1987-07-13 1987-07-13 Pending JPS6413133U (US07541385-20090602-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10795187U JPS6413133U (US07541385-20090602-C00001.png) 1987-07-13 1987-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10795187U JPS6413133U (US07541385-20090602-C00001.png) 1987-07-13 1987-07-13

Publications (1)

Publication Number Publication Date
JPS6413133U true JPS6413133U (US07541385-20090602-C00001.png) 1989-01-24

Family

ID=31342830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10795187U Pending JPS6413133U (US07541385-20090602-C00001.png) 1987-07-13 1987-07-13

Country Status (1)

Country Link
JP (1) JPS6413133U (US07541385-20090602-C00001.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014187213A (ja) * 2013-03-23 2014-10-02 Kyocera Corp 吸着部材、これを用いた真空吸着装置および冷却装置ならびに吸着部材の製造方法
JP2015217415A (ja) * 2014-05-16 2015-12-07 川崎重工業株式会社 吸着定盤及び溶接ロボットシステム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014187213A (ja) * 2013-03-23 2014-10-02 Kyocera Corp 吸着部材、これを用いた真空吸着装置および冷却装置ならびに吸着部材の製造方法
JP2015217415A (ja) * 2014-05-16 2015-12-07 川崎重工業株式会社 吸着定盤及び溶接ロボットシステム

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