JPS6412749U - - Google Patents

Info

Publication number
JPS6412749U
JPS6412749U JP10645387U JP10645387U JPS6412749U JP S6412749 U JPS6412749 U JP S6412749U JP 10645387 U JP10645387 U JP 10645387U JP 10645387 U JP10645387 U JP 10645387U JP S6412749 U JPS6412749 U JP S6412749U
Authority
JP
Japan
Prior art keywords
disc material
arm according
disc
scoop
scooping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10645387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10645387U priority Critical patent/JPS6412749U/ja
Publication of JPS6412749U publication Critical patent/JPS6412749U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Specific Conveyance Elements (AREA)
JP10645387U 1987-07-10 1987-07-10 Pending JPS6412749U (US06262066-20010717-C00424.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10645387U JPS6412749U (US06262066-20010717-C00424.png) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10645387U JPS6412749U (US06262066-20010717-C00424.png) 1987-07-10 1987-07-10

Publications (1)

Publication Number Publication Date
JPS6412749U true JPS6412749U (US06262066-20010717-C00424.png) 1989-01-23

Family

ID=31339982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10645387U Pending JPS6412749U (US06262066-20010717-C00424.png) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPS6412749U (US06262066-20010717-C00424.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07169818A (ja) * 1994-09-19 1995-07-04 Sony Corp ウエハ搬送具
KR101423813B1 (ko) * 2010-09-14 2014-07-28 가부시키가이샤 히다치 고쿠사이 덴키 기판 반송 기구, 기판 처리 장치 및 반도체 장치의 제조 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07169818A (ja) * 1994-09-19 1995-07-04 Sony Corp ウエハ搬送具
KR101423813B1 (ko) * 2010-09-14 2014-07-28 가부시키가이샤 히다치 고쿠사이 덴키 기판 반송 기구, 기판 처리 장치 및 반도체 장치의 제조 방법

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