JPS6412400U - - Google Patents

Info

Publication number

JPS6412400U

JPS6412400U JP10702387U JP10702387U JPS6412400U JP S6412400 U JPS6412400 U JP S6412400U JP 10702387 U JP10702387 U JP 10702387U JP 10702387 U JP10702387 U JP 10702387U JP S6412400 U JPS6412400 U JP S6412400U

Authority

JP

Japan

Prior art keywords

auxiliary electrode

cylindrical member

carrier gas

electrode made

metal

Prior art date

1987-07-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000012159 carrier gas Substances 0.000 claims 2
• 229910052751 metal Inorganic materials 0.000 claims 2
• 239000002184 metal Substances 0.000 claims 2
• 229910052746 lanthanum Inorganic materials 0.000 claims 1
• FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
• 229910052721 tungsten Inorganic materials 0.000 claims 1
• 239000010937 tungsten Substances 0.000 claims 1