JPS6411554U - - Google Patents

Info

Publication number

JPS6411554U

JPS6411554U JP10383687U JP10383687U JPS6411554U JP S6411554 U JPS6411554 U JP S6411554U JP 10383687 U JP10383687 U JP 10383687U JP 10383687 U JP10383687 U JP 10383687U JP S6411554 U JPS6411554 U JP S6411554U

Authority

JP

Japan

Prior art keywords

light

electrode layer

metal film

shielding metal

imaging device

Prior art date

1987-07-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000003384 imaging method Methods 0.000 claims description 4
• 239000010410 layer Substances 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims description 3
• 239000011229 interlayer Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 3
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1