JPS6410078U - - Google Patents
Info
- Publication number
- JPS6410078U JPS6410078U JP10347787U JP10347787U JPS6410078U JP S6410078 U JPS6410078 U JP S6410078U JP 10347787 U JP10347787 U JP 10347787U JP 10347787 U JP10347787 U JP 10347787U JP S6410078 U JPS6410078 U JP S6410078U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- operating rod
- rod
- lid
- transport device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10347787U JPH0523582Y2 (OSRAM) | 1987-07-06 | 1987-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10347787U JPH0523582Y2 (OSRAM) | 1987-07-06 | 1987-07-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6410078U true JPS6410078U (OSRAM) | 1989-01-19 |
| JPH0523582Y2 JPH0523582Y2 (OSRAM) | 1993-06-16 |
Family
ID=31334346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10347787U Expired - Lifetime JPH0523582Y2 (OSRAM) | 1987-07-06 | 1987-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523582Y2 (OSRAM) |
-
1987
- 1987-07-06 JP JP10347787U patent/JPH0523582Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523582Y2 (OSRAM) | 1993-06-16 |