JPS6399753U - - Google Patents

Info

Publication number

JPS6399753U

JPS6399753U JP19515186U JP19515186U JPS6399753U JP S6399753 U JPS6399753 U JP S6399753U JP 19515186 U JP19515186 U JP 19515186U JP 19515186 U JP19515186 U JP 19515186U JP S6399753 U JPS6399753 U JP S6399753U

Authority

JP

Japan

Prior art keywords

filament

metal member

ion beam

surround

power source

Prior art date

1986-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002184 metal Substances 0.000 claims description 6
• 238000010884 ion-beam technique Methods 0.000 claims description 4
• 238000005468 ion implantation Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000006386 neutralization reaction Methods 0.000 description 1