JPS6399748U - - Google Patents
Info
- Publication number
- JPS6399748U JPS6399748U JP19514986U JP19514986U JPS6399748U JP S6399748 U JPS6399748 U JP S6399748U JP 19514986 U JP19514986 U JP 19514986U JP 19514986 U JP19514986 U JP 19514986U JP S6399748 U JPS6399748 U JP S6399748U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- signal voltage
- scanning device
- parallel
- controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図はこの考案の一実施例の説明図、第２図
はその概略断面図、第３図は第１の電極の電極間
隔を調整する手段を示す断面図である。
１……ビーム、２……第１の電極、３……第２
の電極、１５〜１８……平行板。
FIG. 1 is an explanatory diagram of an embodiment of this invention, FIG. 2 is a schematic sectional view thereof, and FIG. 3 is a sectional view showing means for adjusting the electrode spacing of the first electrode. 1... Beam, 2... First electrode, 3... Second
electrodes, 15-18...parallel plates.
Claims (1)
の平行板により構成されて前記ビームをスキヤン
させる信号電圧が印加される第１の電極と、この
第１の電極の前記ビームの射出側に前記平行板と
平行な一対の平行板により構成されるとともに前
記第１の電極と反対向きに前記信号電圧と同期し
た信号電圧が印加されて前記ビームの方向を前記
第１の電極に入射するビームの方向と平行に制御
する第２の電極とを備え、前記第１の電極および
第２の電極の少なくとも一方の電極間隔を調整可
能に構成したことを特徴とするビーム走査装置。 A first electrode is formed of a pair of parallel plates arranged opposite to each other on both sides of the charged particle beam, and to which a signal voltage for scanning the beam is applied; A signal voltage synchronized with the signal voltage is applied in a direction opposite to the first electrode, and the direction of the beam is changed to the direction of the beam incident on the first electrode. and a second electrode that is controlled in parallel with the beam scanning device, the beam scanning device comprising: a second electrode that is controlled in parallel with the beam scanning device, and configured to be able to adjust an electrode interval of at least one of the first electrode and the second electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19514986U JPH0615389Y2 (en) | 1986-12-18 | 1986-12-18 | Beam scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19514986U JPH0615389Y2 (en) | 1986-12-18 | 1986-12-18 | Beam scanning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6399748U true JPS6399748U (en) | 1988-06-28 |
| JPH0615389Y2 JPH0615389Y2 (en) | 1994-04-20 |
Family
ID=31152774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19514986U Expired - Lifetime JPH0615389Y2 (en) | 1986-12-18 | 1986-12-18 | Beam scanning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0615389Y2 (en) |
-
1986
- 1986-12-18 JP JP19514986U patent/JPH0615389Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0615389Y2 (en) | 1994-04-20 |